FR2262126A1 - - Google Patents

Info

Publication number
FR2262126A1
FR2262126A1 FR7501210A FR7501210A FR2262126A1 FR 2262126 A1 FR2262126 A1 FR 2262126A1 FR 7501210 A FR7501210 A FR 7501210A FR 7501210 A FR7501210 A FR 7501210A FR 2262126 A1 FR2262126 A1 FR 2262126A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7501210A
Other languages
French (fr)
Other versions
FR2262126B1 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2262126A1 publication Critical patent/FR2262126A1/fr
Application granted granted Critical
Publication of FR2262126B1 publication Critical patent/FR2262126B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
FR7501210A 1974-02-25 1975-01-10 Expired FR2262126B1 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US445199A US3921572A (en) 1974-02-25 1974-02-25 Vacuum coating apparatus

Publications (2)

Publication Number Publication Date
FR2262126A1 true FR2262126A1 (enrdf_load_stackoverflow) 1975-09-19
FR2262126B1 FR2262126B1 (enrdf_load_stackoverflow) 1976-12-31

Family

ID=23767966

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7501210A Expired FR2262126B1 (enrdf_load_stackoverflow) 1974-02-25 1975-01-10

Country Status (5)

Country Link
US (1) US3921572A (enrdf_load_stackoverflow)
JP (1) JPS50116278A (enrdf_load_stackoverflow)
DE (1) DE2460989A1 (enrdf_load_stackoverflow)
FR (1) FR2262126B1 (enrdf_load_stackoverflow)
GB (1) GB1429622A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0008807A1 (de) * 1978-09-13 1980-03-19 Elektroschmelzwerk Kempten GmbH Vorrichtung und Verfahren zum diskontinuierlichen oder kontinuierlichen thermischen Bedampfen von Formteilen oder Bandmaterial
FR2466513A1 (fr) * 1979-10-03 1981-04-10 Leybold Heraeus Gmbh & Co Kg Installation de depot de materiaux vaporises sous vide, possedant une chambre a soupape et des chambres de depot et d'evaporation
EP0184279A3 (en) * 1984-05-21 1987-06-16 Machine Technology Inc. Method and apparatus for processing a work piece

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4022939A (en) * 1975-12-18 1977-05-10 Western Electric Company, Inc. Synchronous shielding in vacuum deposition system
JPS5319565U (enrdf_load_stackoverflow) * 1976-07-29 1978-02-20
US4137865A (en) * 1976-12-30 1979-02-06 Bell Telephone Laboratories, Incorporated Molecular beam apparatus for processing a plurality of substrates
US4310614A (en) * 1979-03-19 1982-01-12 Xerox Corporation Method and apparatus for pretreating and depositing thin films on substrates
US4269137A (en) * 1979-03-19 1981-05-26 Xerox Corporation Pretreatment of substrates prior to thin film deposition
US5024747A (en) * 1979-12-21 1991-06-18 Varian Associates, Inc. Wafer coating system
US4756815A (en) * 1979-12-21 1988-07-12 Varian Associates, Inc. Wafer coating system
US4478174A (en) * 1983-02-25 1984-10-23 Canadian Patents & Development Limited Vacuum coating vessel with movable shutter plate
US5040484A (en) * 1987-05-04 1991-08-20 Varian Associates, Inc. Apparatus for retaining wafers
US4817556A (en) * 1987-05-04 1989-04-04 Varian Associates, Inc. Apparatus for retaining wafers
US5529634A (en) * 1992-12-28 1996-06-25 Kabushiki Kaisha Toshiba Apparatus and method of manufacturing semiconductor device
US6103069A (en) * 1997-03-31 2000-08-15 Applied Materials, Inc. Chamber design with isolation valve to preserve vacuum during maintenance
JP2007039785A (ja) * 2005-07-04 2007-02-15 Seiko Epson Corp 真空蒸着装置及び電気光学装置の製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2239642A (en) * 1936-05-27 1941-04-22 Bernhard Berghaus Coating of articles by means of cathode disintegration
US2420722A (en) * 1942-12-11 1947-05-20 Bausch & Lomb Apparatus for coating surfaces
US2932588A (en) * 1955-07-06 1960-04-12 English Electric Valve Co Ltd Methods of manufacturing thin films of refractory dielectric materials
US3236205A (en) * 1961-04-24 1966-02-22 Baird Atomic Inc High temperature furnace
US3180751A (en) * 1961-05-26 1965-04-27 Bausch & Lomb Method of forming a composite article
US3491720A (en) * 1965-07-29 1970-01-27 Monsanto Co Epitaxial deposition reactor
US3524426A (en) * 1968-02-29 1970-08-18 Libbey Owens Ford Glass Co Apparatus for coating by thermal evaporation
US3568632A (en) * 1969-03-24 1971-03-09 Gary F Cawthon Lens coating apparatus
US3649339A (en) * 1969-09-05 1972-03-14 Eugene C Smith Apparatus and method for securing a high vacuum for particle coating process
US3641973A (en) * 1970-11-25 1972-02-15 Air Reduction Vacuum coating apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0008807A1 (de) * 1978-09-13 1980-03-19 Elektroschmelzwerk Kempten GmbH Vorrichtung und Verfahren zum diskontinuierlichen oder kontinuierlichen thermischen Bedampfen von Formteilen oder Bandmaterial
FR2466513A1 (fr) * 1979-10-03 1981-04-10 Leybold Heraeus Gmbh & Co Kg Installation de depot de materiaux vaporises sous vide, possedant une chambre a soupape et des chambres de depot et d'evaporation
EP0184279A3 (en) * 1984-05-21 1987-06-16 Machine Technology Inc. Method and apparatus for processing a work piece

Also Published As

Publication number Publication date
JPS50116278A (enrdf_load_stackoverflow) 1975-09-11
US3921572A (en) 1975-11-25
FR2262126B1 (enrdf_load_stackoverflow) 1976-12-31
DE2460989A1 (de) 1975-08-28
GB1429622A (en) 1976-03-24

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Legal Events

Date Code Title Description
ST Notification of lapse