FR2246058B1 - - Google Patents

Info

Publication number
FR2246058B1
FR2246058B1 FR7429843A FR7429843A FR2246058B1 FR 2246058 B1 FR2246058 B1 FR 2246058B1 FR 7429843 A FR7429843 A FR 7429843A FR 7429843 A FR7429843 A FR 7429843A FR 2246058 B1 FR2246058 B1 FR 2246058B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7429843A
Other versions
FR2246058A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of FR2246058A1 publication Critical patent/FR2246058A1/fr
Application granted granted Critical
Publication of FR2246058B1 publication Critical patent/FR2246058B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Particle Accelerators (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
FR7429843A 1973-09-03 1974-09-02 Expired FR2246058B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9908873 1973-09-03

Publications (2)

Publication Number Publication Date
FR2246058A1 FR2246058A1 (fr) 1975-04-25
FR2246058B1 true FR2246058B1 (fr) 1978-02-17

Family

ID=14238133

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7429843A Expired FR2246058B1 (fr) 1973-09-03 1974-09-02

Country Status (4)

Country Link
US (1) US3952198A (fr)
DE (1) DE2440344C3 (fr)
FR (1) FR2246058B1 (fr)
GB (1) GB1463748A (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5492050A (en) * 1977-12-29 1979-07-20 Jeol Ltd Method and apparatus for astigmatic correction of scanning electronic microscope and others
DD134582A1 (de) * 1978-01-19 1979-03-07 Eberhard Hahn Verfahren und einrichtung zur justierung einer elektronenstrahlbearbeitungsanlage
US4414474A (en) * 1982-02-17 1983-11-08 University Patents, Inc. Corrector for axial aberrations in electron optic instruments
DE3235068A1 (de) * 1982-09-22 1984-03-22 Siemens AG, 1000 Berlin und 8000 München Varioformstrahl-ablenkobjektiv fuer neutralteilchen und verfahren zu seinem betrieb
US4687936A (en) * 1985-07-11 1987-08-18 Varian Associates, Inc. In-line beam scanning system
US4962309A (en) * 1989-08-21 1990-10-09 Rockwell International Corporation Magnetic optics adaptive technique
NL9100294A (nl) * 1991-02-20 1992-09-16 Philips Nv Geladen deeltjesbundelinrichting.
WO1997044811A1 (fr) * 1996-05-21 1997-11-27 Philips Electronics N.V. Correcteur d'aberrations de lentilles d'appareils optiques a rayonnement corpusculaire
DE10159454B4 (de) * 2001-12-04 2012-08-02 Carl Zeiss Nts Gmbh Korrektor zur Korrektion von Farbfehlern erster Ordnung, ersten Grades
DE10159308A1 (de) * 2001-12-04 2003-06-12 Ceos Gmbh Teilchenoptischer Korrektor
JP4275441B2 (ja) * 2003-03-31 2009-06-10 株式会社日立ハイテクノロジーズ 収差補正器付電子線装置
US7391034B1 (en) * 2005-03-16 2008-06-24 Kla-Tencor Technologies Corporation Electron imaging beam with reduced space charge defocusing
US7888652B2 (en) * 2006-11-27 2011-02-15 Nissin Ion Equipment Co., Ltd. Ion implantation apparatus
WO2019215893A1 (fr) * 2018-05-10 2019-11-14 株式会社日立ハイテクノロジーズ Lentille multipolaire, ainsi que correcteur d'aberration et dispositif de faisceau de particules chargées l'utilisant

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2919381A (en) * 1956-07-25 1959-12-29 Farrand Optical Co Inc Electron lens
US3201631A (en) * 1959-01-02 1965-08-17 High Voltage Engineering Corp Short focus lens at focal point of long focus lens

Also Published As

Publication number Publication date
US3952198A (en) 1976-04-20
DE2440344C3 (de) 1982-04-15
DE2440344B2 (de) 1976-09-30
FR2246058A1 (fr) 1975-04-25
GB1463748A (en) 1977-02-09
DE2440344A1 (de) 1975-03-27

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Legal Events

Date Code Title Description
ST Notification of lapse