FR2245984B1 - - Google Patents

Info

Publication number
FR2245984B1
FR2245984B1 FR7428145A FR7428145A FR2245984B1 FR 2245984 B1 FR2245984 B1 FR 2245984B1 FR 7428145 A FR7428145 A FR 7428145A FR 7428145 A FR7428145 A FR 7428145A FR 2245984 B1 FR2245984 B1 FR 2245984B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7428145A
Other languages
French (fr)
Other versions
FR2245984A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2245984A1 publication Critical patent/FR2245984A1/fr
Application granted granted Critical
Publication of FR2245984B1 publication Critical patent/FR2245984B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G03F7/70433—Layout for increasing efficiency or for compensating imaging errors, e.g. layout of exposure fields for reducing focus errors; Use of mask features for increasing efficiency or for compensating imaging errors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
FR7428145A 1973-09-27 1974-08-08 Expired FR2245984B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US40130373A 1973-09-27 1973-09-27

Publications (2)

Publication Number Publication Date
FR2245984A1 FR2245984A1 (en) 1975-04-25
FR2245984B1 true FR2245984B1 (en) 1977-03-18

Family

ID=23587182

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7428145A Expired FR2245984B1 (en) 1973-09-27 1974-08-08

Country Status (4)

Country Link
JP (1) JPS5061989A (en)
DE (1) DE2442850A1 (en)
FR (1) FR2245984B1 (en)
GB (1) GB1445914A (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961944A (en) * 1982-09-30 1984-04-09 Fujitsu Ltd Manufacture of master slice integrated circuit
FR2578668B1 (en) * 1985-03-08 1989-06-02 Hennion Bernard ELECTRONIC CIRCUIT SIMULATION SYSTEM
JPS6274158A (en) * 1985-09-27 1987-04-04 Hitachi Ltd Circuit converting system
US5175696A (en) * 1986-09-12 1992-12-29 Digital Equipment Corporation Rule structure in a procedure for synthesis of logic circuits
AU7728187A (en) * 1986-09-12 1988-03-17 Digital Equipment Corporation Cad of logic circuits: rule structure for inserting new elements
US5222029A (en) * 1986-09-12 1993-06-22 Digital Equipment Corporation Bitwise implementation mechanism for a circuit design synthesis procedure
US5095441A (en) * 1986-09-12 1992-03-10 Digital Equipment Corporation Rule inference and localization during synthesis of logic circuit designs
US5212650A (en) * 1986-09-12 1993-05-18 Digital Equipment Corporation Procedure and data structure for synthesis and transformation of logic circuit designs
US5267175A (en) * 1986-09-12 1993-11-30 Digital Equipment Corporation Data base access mechanism for rules utilized by a synthesis procedure for logic circuit design
US5150308A (en) * 1986-09-12 1992-09-22 Digital Equipment Corporation Parameter and rule creation and modification mechanism for use by a procedure for synthesis of logic circuit designs
US5151867A (en) * 1986-09-12 1992-09-29 Digital Equipment Corporation Method of minimizing sum-of-product cases in a heterogeneous data base environment for circuit synthesis
US4922432A (en) * 1988-01-13 1990-05-01 International Chip Corporation Knowledge based method and apparatus for designing integrated circuits using functional specifications
JP2954223B2 (en) * 1988-11-08 1999-09-27 富士通株式会社 Method for manufacturing semiconductor device
EP0385013B1 (en) * 1989-03-03 1999-06-16 Trw Inc. Production of precision patterns on curved surfaces
US5299137A (en) * 1990-04-05 1994-03-29 Vlsi Technology, Inc. Behavioral synthesis of circuits including high impedance buffers
BE1003143A6 (en) * 1991-04-30 1991-12-10 Ardill Robert Henry APPARATUS FOR MEASURING MILK IN A DISCONTINUOUS MANNER.
US5617327A (en) * 1993-07-30 1997-04-01 Xilinx, Inc. Method for entering state flow diagrams using schematic editor programs

Also Published As

Publication number Publication date
DE2442850A1 (en) 1975-04-10
GB1445914A (en) 1976-08-11
FR2245984A1 (en) 1975-04-25
JPS5061989A (en) 1975-05-27

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Legal Events

Date Code Title Description
ST Notification of lapse