FR2198000A1 - - Google Patents

Info

Publication number
FR2198000A1
FR2198000A1 FR7230978A FR7230978A FR2198000A1 FR 2198000 A1 FR2198000 A1 FR 2198000A1 FR 7230978 A FR7230978 A FR 7230978A FR 7230978 A FR7230978 A FR 7230978A FR 2198000 A1 FR2198000 A1 FR 2198000A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7230978A
Other languages
French (fr)
Other versions
FR2198000B1 (xx
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Priority to FR7230978A priority Critical patent/FR2198000B1/fr
Priority to CH1165673A priority patent/CH579154A5/xx
Priority to DE19732342376 priority patent/DE2342376A1/de
Priority to GB4053673A priority patent/GB1383189A/en
Priority to NL7311976A priority patent/NL7311976A/xx
Priority to JP9745473A priority patent/JPS4966577A/ja
Publication of FR2198000A1 publication Critical patent/FR2198000A1/fr
Application granted granted Critical
Publication of FR2198000B1 publication Critical patent/FR2198000B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/46—Sputtering by ion beam produced by an external ion source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
FR7230978A 1972-08-31 1972-08-31 Expired FR2198000B1 (xx)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR7230978A FR2198000B1 (xx) 1972-08-31 1972-08-31
CH1165673A CH579154A5 (xx) 1972-08-31 1973-08-14
DE19732342376 DE2342376A1 (de) 1972-08-31 1973-08-22 Vorrichtung fuer das auftragen von duennen schichten unter vakuum
GB4053673A GB1383189A (en) 1972-08-31 1973-08-28 Apparatus for the vacuum deposition of thin layers
NL7311976A NL7311976A (xx) 1972-08-31 1973-08-30
JP9745473A JPS4966577A (xx) 1972-08-31 1973-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7230978A FR2198000B1 (xx) 1972-08-31 1972-08-31

Publications (2)

Publication Number Publication Date
FR2198000A1 true FR2198000A1 (xx) 1974-03-29
FR2198000B1 FR2198000B1 (xx) 1975-01-03

Family

ID=9103749

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7230978A Expired FR2198000B1 (xx) 1972-08-31 1972-08-31

Country Status (6)

Country Link
JP (1) JPS4966577A (xx)
CH (1) CH579154A5 (xx)
DE (1) DE2342376A1 (xx)
FR (1) FR2198000B1 (xx)
GB (1) GB1383189A (xx)
NL (1) NL7311976A (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2421957A1 (fr) * 1978-01-04 1979-11-02 Kovalsky Georgy Dispositif pour l'application a l'aide d'ions-plasma, de revetements sur des articles

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58195438U (ja) * 1982-06-22 1983-12-26 日本電気株式会社 集積回路の輸送車
ATE65265T1 (de) * 1987-08-26 1991-08-15 Balzers Hochvakuum Verfahren zur aufbringung von schichten auf substraten und vakuumbeschichtungsanlage zur durchfuehrung des verfahrens.
GB8720415D0 (en) * 1987-08-28 1987-10-07 Vg Instr Group Vacuum evaporation & deposition
DE3832693A1 (de) * 1988-09-27 1990-03-29 Leybold Ag Vorrichtung zum aufbringen dielektrischer oder metallischer werkstoffe

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NEANT *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2421957A1 (fr) * 1978-01-04 1979-11-02 Kovalsky Georgy Dispositif pour l'application a l'aide d'ions-plasma, de revetements sur des articles

Also Published As

Publication number Publication date
CH579154A5 (xx) 1976-08-31
GB1383189A (en) 1975-02-05
NL7311976A (xx) 1974-03-04
FR2198000B1 (xx) 1975-01-03
JPS4966577A (xx) 1974-06-27
DE2342376A1 (de) 1974-03-14

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Legal Events

Date Code Title Description
ST Notification of lapse