FR2194043A1 - - Google Patents
Info
- Publication number
- FR2194043A1 FR2194043A1 FR7326591A FR7326591A FR2194043A1 FR 2194043 A1 FR2194043 A1 FR 2194043A1 FR 7326591 A FR7326591 A FR 7326591A FR 7326591 A FR7326591 A FR 7326591A FR 2194043 A1 FR2194043 A1 FR 2194043A1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/063—Geometrical arrangement of electrodes for beam-forming
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP47072865A JPS4929969A (en) | 1972-07-20 | 1972-07-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2194043A1 true FR2194043A1 (en) | 1974-02-22 |
Family
ID=13501645
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7326591A Withdrawn FR2194043A1 (en) | 1972-07-20 | 1973-07-19 |
Country Status (4)
Country | Link |
---|---|
US (1) | US3878424A (en) |
JP (1) | JPS4929969A (en) |
DE (1) | DE2337142A1 (en) |
FR (1) | FR2194043A1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2459665A1 (en) * | 1974-12-17 | 1976-07-01 | Siemens Ag | PROCESS FOR PRODUCING A BODY SECTION AND ARRANGEMENT FOR CARRYING OUT THE PROCESS |
FR2471666A1 (en) * | 1979-12-14 | 1981-06-19 | Labo Electronique Physique | Electron gun with adjustable beam current - has cylindrical anode and disc shaped cathode with annular beam current controlling grids to provide uniform density beam |
EP0045932A2 (en) * | 1980-08-07 | 1982-02-17 | International Standard Electric Corporation | Method for shortening the heatingtime of an indirectly heated cathode |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4020318A (en) * | 1975-01-24 | 1977-04-26 | The Welding Institute | Electron beam generators |
JPS6023455B2 (en) * | 1978-10-17 | 1985-06-07 | 株式会社東芝 | Directly heated cathode structure |
NL7906958A (en) * | 1979-09-19 | 1981-03-23 | Philips Nv | METAL WIRE CATHOD FOR ELECTRON RADIUS. |
DE3332549A1 (en) * | 1983-09-09 | 1985-03-28 | Fa. Carl Zeiss, 7920 Heidenheim | METHOD AND DEVICE FOR PREVENTING CATHODE DAMAGE WHEN SWITCHING ON FIELD EMISSION RADIATORS |
DE59010590D1 (en) * | 1989-09-09 | 1997-01-16 | Ptr Praezisionstech Gmbh | Cathode holder for an electron gun |
DE3930201A1 (en) * | 1989-09-09 | 1991-03-14 | Ptr Praezisionstech Gmbh | Current transfer contact for electron gun - has separate relatively movable connecting and contact element components |
US5182488A (en) * | 1991-08-27 | 1993-01-26 | The Boc Group, Inc. | Electron beam gun for use in an electron beam evaporation source |
CN114937585A (en) * | 2017-04-11 | 2022-08-23 | Asml荷兰有限公司 | Charged particle source module |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2522259A (en) * | 1948-05-06 | 1950-09-12 | Bell Telephone Labor Inc | Electrode temperature regulation |
US3005123A (en) * | 1959-07-16 | 1961-10-17 | Griffiths Electronics Inc | Electron gun construction |
US3389290A (en) * | 1965-04-06 | 1968-06-18 | Sony Corp | Electron gun device |
US3500106A (en) * | 1965-09-10 | 1970-03-10 | Bell & Howell Co | Cathode |
GB1191191A (en) * | 1968-05-08 | 1970-05-06 | Hitachi Ltd | Improvements in Electron Microscopes |
US3610988A (en) * | 1968-12-12 | 1971-10-05 | Telefunken Patent | Cathode arrangement and cathode-ray tube having such a cathode arrangement |
US3763388A (en) * | 1971-10-19 | 1973-10-02 | Gte Sylvania Inc | Cathode ray tube electron gun |
US3792263A (en) * | 1972-09-13 | 1974-02-12 | Jeol Ltd | Scanning electron microscope with means to remove low energy electrons from the primary electron beam |
-
1972
- 1972-07-20 JP JP47072865A patent/JPS4929969A/ja active Pending
-
1973
- 1973-07-17 US US380100A patent/US3878424A/en not_active Expired - Lifetime
- 1973-07-19 FR FR7326591A patent/FR2194043A1/fr not_active Withdrawn
- 1973-07-20 DE DE19732337142 patent/DE2337142A1/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2459665A1 (en) * | 1974-12-17 | 1976-07-01 | Siemens Ag | PROCESS FOR PRODUCING A BODY SECTION AND ARRANGEMENT FOR CARRYING OUT THE PROCESS |
FR2471666A1 (en) * | 1979-12-14 | 1981-06-19 | Labo Electronique Physique | Electron gun with adjustable beam current - has cylindrical anode and disc shaped cathode with annular beam current controlling grids to provide uniform density beam |
EP0045932A2 (en) * | 1980-08-07 | 1982-02-17 | International Standard Electric Corporation | Method for shortening the heatingtime of an indirectly heated cathode |
EP0045932A3 (en) * | 1980-08-07 | 1982-06-09 | International Standard Electric Corporation | Indirectly heated cathode associated with a wehnelt cylinder |
Also Published As
Publication number | Publication date |
---|---|
US3878424A (en) | 1975-04-15 |
DE2337142A1 (en) | 1974-02-14 |
JPS4929969A (en) | 1974-03-16 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |