FR2194043A1 - - Google Patents

Info

Publication number
FR2194043A1
FR2194043A1 FR7326591A FR7326591A FR2194043A1 FR 2194043 A1 FR2194043 A1 FR 2194043A1 FR 7326591 A FR7326591 A FR 7326591A FR 7326591 A FR7326591 A FR 7326591A FR 2194043 A1 FR2194043 A1 FR 2194043A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7326591A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Publication of FR2194043A1 publication Critical patent/FR2194043A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electron Sources, Ion Sources (AREA)
FR7326591A 1972-07-20 1973-07-19 Withdrawn FR2194043A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47072865A JPS4929969A (en) 1972-07-20 1972-07-20

Publications (1)

Publication Number Publication Date
FR2194043A1 true FR2194043A1 (en) 1974-02-22

Family

ID=13501645

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7326591A Withdrawn FR2194043A1 (en) 1972-07-20 1973-07-19

Country Status (4)

Country Link
US (1) US3878424A (en)
JP (1) JPS4929969A (en)
DE (1) DE2337142A1 (en)
FR (1) FR2194043A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2459665A1 (en) * 1974-12-17 1976-07-01 Siemens Ag PROCESS FOR PRODUCING A BODY SECTION AND ARRANGEMENT FOR CARRYING OUT THE PROCESS
FR2471666A1 (en) * 1979-12-14 1981-06-19 Labo Electronique Physique Electron gun with adjustable beam current - has cylindrical anode and disc shaped cathode with annular beam current controlling grids to provide uniform density beam
EP0045932A2 (en) * 1980-08-07 1982-02-17 International Standard Electric Corporation Method for shortening the heatingtime of an indirectly heated cathode

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4020318A (en) * 1975-01-24 1977-04-26 The Welding Institute Electron beam generators
JPS6023455B2 (en) * 1978-10-17 1985-06-07 株式会社東芝 Directly heated cathode structure
NL7906958A (en) * 1979-09-19 1981-03-23 Philips Nv METAL WIRE CATHOD FOR ELECTRON RADIUS.
DE3332549A1 (en) * 1983-09-09 1985-03-28 Fa. Carl Zeiss, 7920 Heidenheim METHOD AND DEVICE FOR PREVENTING CATHODE DAMAGE WHEN SWITCHING ON FIELD EMISSION RADIATORS
DE59010590D1 (en) * 1989-09-09 1997-01-16 Ptr Praezisionstech Gmbh Cathode holder for an electron gun
DE3930201A1 (en) * 1989-09-09 1991-03-14 Ptr Praezisionstech Gmbh Current transfer contact for electron gun - has separate relatively movable connecting and contact element components
US5182488A (en) * 1991-08-27 1993-01-26 The Boc Group, Inc. Electron beam gun for use in an electron beam evaporation source
CN114937585A (en) * 2017-04-11 2022-08-23 Asml荷兰有限公司 Charged particle source module

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2522259A (en) * 1948-05-06 1950-09-12 Bell Telephone Labor Inc Electrode temperature regulation
US3005123A (en) * 1959-07-16 1961-10-17 Griffiths Electronics Inc Electron gun construction
US3389290A (en) * 1965-04-06 1968-06-18 Sony Corp Electron gun device
US3500106A (en) * 1965-09-10 1970-03-10 Bell & Howell Co Cathode
GB1191191A (en) * 1968-05-08 1970-05-06 Hitachi Ltd Improvements in Electron Microscopes
US3610988A (en) * 1968-12-12 1971-10-05 Telefunken Patent Cathode arrangement and cathode-ray tube having such a cathode arrangement
US3763388A (en) * 1971-10-19 1973-10-02 Gte Sylvania Inc Cathode ray tube electron gun
US3792263A (en) * 1972-09-13 1974-02-12 Jeol Ltd Scanning electron microscope with means to remove low energy electrons from the primary electron beam

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2459665A1 (en) * 1974-12-17 1976-07-01 Siemens Ag PROCESS FOR PRODUCING A BODY SECTION AND ARRANGEMENT FOR CARRYING OUT THE PROCESS
FR2471666A1 (en) * 1979-12-14 1981-06-19 Labo Electronique Physique Electron gun with adjustable beam current - has cylindrical anode and disc shaped cathode with annular beam current controlling grids to provide uniform density beam
EP0045932A2 (en) * 1980-08-07 1982-02-17 International Standard Electric Corporation Method for shortening the heatingtime of an indirectly heated cathode
EP0045932A3 (en) * 1980-08-07 1982-06-09 International Standard Electric Corporation Indirectly heated cathode associated with a wehnelt cylinder

Also Published As

Publication number Publication date
US3878424A (en) 1975-04-15
DE2337142A1 (en) 1974-02-14
JPS4929969A (en) 1974-03-16

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Legal Events

Date Code Title Description
ST Notification of lapse