FR2181842B1 - - Google Patents

Info

Publication number
FR2181842B1
FR2181842B1 FR7310219A FR7310219A FR2181842B1 FR 2181842 B1 FR2181842 B1 FR 2181842B1 FR 7310219 A FR7310219 A FR 7310219A FR 7310219 A FR7310219 A FR 7310219A FR 2181842 B1 FR2181842 B1 FR 2181842B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7310219A
Other languages
French (fr)
Other versions
FR2181842A1 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US00247614A external-priority patent/US3851758A/en
Priority claimed from US247639A external-priority patent/US3915784A/en
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2181842A1 publication Critical patent/FR2181842A1/fr
Application granted granted Critical
Publication of FR2181842B1 publication Critical patent/FR2181842B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H01L21/3043—Making grooves, e.g. cutting

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
FR7310219A 1972-04-26 1973-03-13 Expired FR2181842B1 (enrdf_load_stackoverflow)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US24753072A 1972-04-26 1972-04-26
US00247614A US3851758A (en) 1972-04-26 1972-04-26 Semiconductor chip fixture
US247639A US3915784A (en) 1972-04-26 1972-04-26 Method of semiconductor chip separation

Publications (2)

Publication Number Publication Date
FR2181842A1 FR2181842A1 (enrdf_load_stackoverflow) 1973-12-07
FR2181842B1 true FR2181842B1 (enrdf_load_stackoverflow) 1977-07-29

Family

ID=27400049

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7310219A Expired FR2181842B1 (enrdf_load_stackoverflow) 1972-04-26 1973-03-13

Country Status (5)

Country Link
CH (1) CH554076A (enrdf_load_stackoverflow)
DE (1) DE2317649C3 (enrdf_load_stackoverflow)
FR (1) FR2181842B1 (enrdf_load_stackoverflow)
IT (1) IT981199B (enrdf_load_stackoverflow)
NL (1) NL7304000A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4138304A (en) * 1977-11-03 1979-02-06 General Electric Company Wafer sawing technique
DE102005047509B4 (de) * 2005-10-04 2017-10-26 Degotec Gmbh Vorrichtung zur Separierung eines flächigen Objektes von einem Körper, mit dem das Objekt mittels Adhäsionskraft verbunden ist

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3632074A (en) * 1967-10-09 1972-01-04 Western Electric Co Releasable mounting and method of placing an oriented array of devices on the mounting
US3590462A (en) * 1968-11-18 1971-07-06 Western Electric Co Method and apparatus for expanding an array of articles

Also Published As

Publication number Publication date
FR2181842A1 (enrdf_load_stackoverflow) 1973-12-07
DE2317649A1 (de) 1973-11-15
DE2317649B2 (de) 1975-04-03
NL7304000A (enrdf_load_stackoverflow) 1973-10-30
IT981199B (it) 1974-10-10
CH554076A (de) 1974-09-13
DE2317649C3 (de) 1975-11-27

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Legal Events

Date Code Title Description
ST Notification of lapse