FR2162038B1 - - Google Patents

Info

Publication number
FR2162038B1
FR2162038B1 FR7242337A FR7242337A FR2162038B1 FR 2162038 B1 FR2162038 B1 FR 2162038B1 FR 7242337 A FR7242337 A FR 7242337A FR 7242337 A FR7242337 A FR 7242337A FR 2162038 B1 FR2162038 B1 FR 2162038B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7242337A
Other languages
French (fr)
Other versions
FR2162038A1 (enExample
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Micronas GmbH
ITT Inc
Original Assignee
Deutsche ITT Industries GmbH
ITT Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Deutsche ITT Industries GmbH, ITT Industries Inc filed Critical Deutsche ITT Industries GmbH
Publication of FR2162038A1 publication Critical patent/FR2162038A1/fr
Application granted granted Critical
Publication of FR2162038B1 publication Critical patent/FR2162038B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/02—Local etching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Drying Of Semiconductors (AREA)
FR7242337A 1971-12-02 1972-11-29 Expired FR2162038B1 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB55959/71A GB1299837A (en) 1971-12-02 1971-12-02 Method of producing electrical interconnection patterns

Publications (2)

Publication Number Publication Date
FR2162038A1 FR2162038A1 (enExample) 1973-07-13
FR2162038B1 true FR2162038B1 (enExample) 1976-04-23

Family

ID=10475337

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7242337A Expired FR2162038B1 (enExample) 1971-12-02 1972-11-29

Country Status (4)

Country Link
DE (1) DE2257201A1 (enExample)
FR (1) FR2162038B1 (enExample)
GB (1) GB1299837A (enExample)
ZA (1) ZA727342B (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2088595A5 (enExample) * 1970-04-17 1972-01-07 Cii
US3700508A (en) * 1970-06-25 1972-10-24 Gen Instrument Corp Fabrication of integrated microcircuit devices

Also Published As

Publication number Publication date
GB1299837A (en) 1972-12-13
ZA727342B (en) 1973-06-27
DE2257201A1 (de) 1973-06-14
FR2162038A1 (enExample) 1973-07-13

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Legal Events

Date Code Title Description
ST Notification of lapse