FR2155653A5 - - Google Patents

Info

Publication number
FR2155653A5
FR2155653A5 FR7235566A FR7235566A FR2155653A5 FR 2155653 A5 FR2155653 A5 FR 2155653A5 FR 7235566 A FR7235566 A FR 7235566A FR 7235566 A FR7235566 A FR 7235566A FR 2155653 A5 FR2155653 A5 FR 2155653A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7235566A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MOLEKULARELEKTRONIK
Original Assignee
MOLEKULARELEKTRONIK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MOLEKULARELEKTRONIK filed Critical MOLEKULARELEKTRONIK
Application granted granted Critical
Publication of FR2155653A5 publication Critical patent/FR2155653A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
FR7235566A 1971-10-08 1972-10-06 Expired FR2155653A5 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD15817771 1971-10-08

Publications (1)

Publication Number Publication Date
FR2155653A5 true FR2155653A5 (enExample) 1973-05-18

Family

ID=5484425

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7235566A Expired FR2155653A5 (enExample) 1971-10-08 1972-10-06

Country Status (3)

Country Link
CS (1) CS154879B1 (enExample)
DE (1) DE2244625A1 (enExample)
FR (1) FR2155653A5 (enExample)

Also Published As

Publication number Publication date
CS154879B1 (enExample) 1974-04-30
DE2244625A1 (de) 1973-04-12

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Legal Events

Date Code Title Description
ST Notification of lapse