CS154879B1 - - Google Patents
Info
- Publication number
- CS154879B1 CS154879B1 CS680272A CS680272A CS154879B1 CS 154879 B1 CS154879 B1 CS 154879B1 CS 680272 A CS680272 A CS 680272A CS 680272 A CS680272 A CS 680272A CS 154879 B1 CS154879 B1 CS 154879B1
- Authority
- CS
- Czechoslovakia
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD15817771 | 1971-10-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CS154879B1 true CS154879B1 (cs) | 1974-04-30 |
Family
ID=5484425
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CS680272A CS154879B1 (cs) | 1971-10-08 | 1972-10-09 |
Country Status (3)
| Country | Link |
|---|---|
| CS (1) | CS154879B1 (cs) |
| DE (1) | DE2244625A1 (cs) |
| FR (1) | FR2155653A5 (cs) |
-
1972
- 1972-09-12 DE DE2244625A patent/DE2244625A1/de active Pending
- 1972-10-06 FR FR7235566A patent/FR2155653A5/fr not_active Expired
- 1972-10-09 CS CS680272A patent/CS154879B1/cs unknown
Also Published As
| Publication number | Publication date |
|---|---|
| FR2155653A5 (cs) | 1973-05-18 |
| DE2244625A1 (de) | 1973-04-12 |