FR2154479A1 - - Google Patents
Info
- Publication number
- FR2154479A1 FR2154479A1 FR7231798A FR7231798A FR2154479A1 FR 2154479 A1 FR2154479 A1 FR 2154479A1 FR 7231798 A FR7231798 A FR 7231798A FR 7231798 A FR7231798 A FR 7231798A FR 2154479 A1 FR2154479 A1 FR 2154479A1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8222—Bipolar technology
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
- H01L21/2251—Diffusion into or out of group IV semiconductors
- H01L21/2254—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides
- H01L21/2255—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides the applied layer comprising oxides only, e.g. P2O5, PSG, H3BO3, doped oxides
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD15775571 | 1971-09-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2154479A1 true FR2154479A1 (de) | 1973-05-11 |
Family
ID=5484328
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7231798A Withdrawn FR2154479A1 (de) | 1971-09-16 | 1972-09-07 |
Country Status (4)
Country | Link |
---|---|
CS (1) | CS180653B1 (de) |
DE (1) | DE2238808A1 (de) |
FR (1) | FR2154479A1 (de) |
HU (1) | HU165229B (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2713384A1 (de) * | 2012-09-26 | 2014-04-02 | Industrial Technology Research Institute | Verfahren zur Bildung strukturierter Dotierungsregionen |
-
1972
- 1972-08-07 DE DE19722238808 patent/DE2238808A1/de active Pending
- 1972-08-21 HU HUMO000842 patent/HU165229B/hu unknown
- 1972-09-07 FR FR7231798A patent/FR2154479A1/fr not_active Withdrawn
- 1972-09-15 CS CS633572A patent/CS180653B1/cs unknown
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2713384A1 (de) * | 2012-09-26 | 2014-04-02 | Industrial Technology Research Institute | Verfahren zur Bildung strukturierter Dotierungsregionen |
US9012314B2 (en) | 2012-09-26 | 2015-04-21 | Industrial Technology Research Institute | Method for forming patterned doping regions |
US9040401B1 (en) | 2012-09-26 | 2015-05-26 | Industrial Technology Research Institute | Method for forming patterned doping regions |
Also Published As
Publication number | Publication date |
---|---|
HU165229B (de) | 1974-07-27 |
CS180653B1 (en) | 1978-01-31 |
DE2238808A1 (de) | 1973-03-22 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |