FR2147497A5 - - Google Patents

Info

Publication number
FR2147497A5
FR2147497A5 FR7127812A FR7127812A FR2147497A5 FR 2147497 A5 FR2147497 A5 FR 2147497A5 FR 7127812 A FR7127812 A FR 7127812A FR 7127812 A FR7127812 A FR 7127812A FR 2147497 A5 FR2147497 A5 FR 2147497A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7127812A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7127812A priority Critical patent/FR2147497A5/fr
Priority to US00275304A priority patent/US3778656A/en
Priority to GB3521172A priority patent/GB1352654A/en
Priority to DE19727228091U priority patent/DE7228091U/de
Priority to DE2237252A priority patent/DE2237252A1/de
Application granted granted Critical
Publication of FR2147497A5 publication Critical patent/FR2147497A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Plasma Technology (AREA)
FR7127812A 1971-07-29 1971-07-29 Expired FR2147497A5 (show.php)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR7127812A FR2147497A5 (show.php) 1971-07-29 1971-07-29
US00275304A US3778656A (en) 1971-07-29 1972-07-26 Ion source employing a microwave resonant cavity
GB3521172A GB1352654A (en) 1971-07-29 1972-07-27 Ion source which makes use of a microwave resonant cavity
DE19727228091U DE7228091U (de) 1971-07-29 1972-07-28 Ionenquelle mit hochfrequenz-hohlraumresonator
DE2237252A DE2237252A1 (de) 1971-07-29 1972-07-28 Ionenquelle mit hochfrequenz-hohlraumresonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7127812A FR2147497A5 (show.php) 1971-07-29 1971-07-29

Publications (1)

Publication Number Publication Date
FR2147497A5 true FR2147497A5 (show.php) 1973-03-09

Family

ID=9081130

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7127812A Expired FR2147497A5 (show.php) 1971-07-29 1971-07-29

Country Status (4)

Country Link
US (1) US3778656A (show.php)
DE (2) DE2237252A1 (show.php)
FR (1) FR2147497A5 (show.php)
GB (1) GB1352654A (show.php)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2475798A1 (fr) * 1980-02-13 1981-08-14 Commissariat Energie Atomique Procede et dispositif de production d'ions lourds fortement charges et une application mettant en oeuvre le procede
EP0334184A3 (en) * 1988-03-16 1989-11-29 Hitachi, Ltd. Microwave ion source

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2621824C2 (de) * 1976-05-17 1982-04-29 Hitachi, Ltd., Tokyo Mikrowellen-Entladungs-Ionenquelle
US4185213A (en) * 1977-08-31 1980-01-22 Reynolds Metals Company Gaseous electrode for MHD generator
JPS55131175A (en) * 1979-03-30 1980-10-11 Toshiba Corp Surface treatment apparatus with microwave plasma
US4240007A (en) * 1979-06-29 1980-12-16 International Business Machines Corporation Microchannel ion gun
US4393333A (en) * 1979-12-10 1983-07-12 Hitachi, Ltd. Microwave plasma ion source
JPS5947421B2 (ja) * 1980-03-24 1984-11-19 株式会社日立製作所 マイクロ波イオン源
CA1159012A (en) * 1980-05-02 1983-12-20 Seitaro Matsuo Plasma deposition apparatus
JPS5779621A (en) * 1980-11-05 1982-05-18 Mitsubishi Electric Corp Plasma processing device
JPS6043620B2 (ja) * 1982-11-25 1985-09-28 日新ハイボルテージ株式会社 マイクロ波イオン源
US4507588A (en) * 1983-02-28 1985-03-26 Board Of Trustees Operating Michigan State University Ion generating apparatus and method for the use thereof
FR2546358B1 (fr) * 1983-05-20 1985-07-05 Commissariat Energie Atomique Source d'ions a resonance cyclotronique des electrons
FR2572847B1 (fr) * 1984-11-06 1986-12-26 Commissariat Energie Atomique Procede et dispositif d'allumage d'une source d'ions hyperfrequence
US4649278A (en) * 1985-05-02 1987-03-10 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Generation of intense negative ion beams
DE3703207A1 (de) * 1987-02-04 1988-08-18 Loet Und Schweissgeraete Gmbh Hochfrequenzionenquelle
DE3712971A1 (de) * 1987-04-16 1988-11-03 Plasonic Oberflaechentechnik G Verfahren und vorrichtung zum erzeugen eines plasmas
US4778561A (en) * 1987-10-30 1988-10-18 Veeco Instruments, Inc. Electron cyclotron resonance plasma source
DE3738352A1 (de) * 1987-11-11 1989-05-24 Technics Plasma Gmbh Filamentloses magnetron-ionenstrahlsystem
DE3803355A1 (de) * 1988-02-05 1989-08-17 Leybold Ag Teilchenquelle fuer eine reaktive ionenstrahlaetz- oder plasmadepositionsanlage
DE3834984A1 (de) * 1988-10-14 1990-04-19 Leybold Ag Einrichtung zur erzeugung von elektrisch geladenen und/oder ungeladenen teilchen
GB9224745D0 (en) * 1992-11-26 1993-01-13 Atomic Energy Authority Uk Microwave plasma generator
DE19513345C2 (de) * 1995-04-08 2000-08-03 Ehret Hans P ECR-Ionenquelle
DE19600223A1 (de) * 1996-01-05 1997-07-17 Ralf Dr Dipl Phys Spitzl Vorrichtung zur Erzeugung von Plasmen mittels Mikrowellen
DE19608949A1 (de) * 1996-03-08 1997-09-11 Ralf Dr Spitzl Vorrichtung zur Erzeugung von leistungsfähigen Mikrowellenplasmen
DE19757852C2 (de) * 1997-12-24 2001-06-28 Karlsruhe Forschzent Vorrichtung und Verfahren zur Dotierung von Gefäßstützen mit radiaktiven und nicht radioaktiven Atomen
DE19900437B4 (de) * 1999-01-11 2009-04-23 Ehret, Hans-P. Verfahren und Vorrichtung zur Ionenimplantation in Festkörpern und/oder zur Beschichtung von Festkörperoberflächen sowie die Verwendung von Verfahren und Vorrichtung
ES2272909T3 (es) * 2003-03-20 2007-05-01 Elwing Llc Propulsor para vehiculo espacial.
US7461502B2 (en) * 2003-03-20 2008-12-09 Elwing Llc Spacecraft thruster
ATE454553T1 (de) * 2004-09-22 2010-01-15 Elwing Llc Antriebssystem für raumfahrzeuge
WO2009048739A2 (en) 2007-10-10 2009-04-16 Mks Instruments, Inc. Chemical ionization reaction or proton transfer reaction mass spectrometry with a quadrupole or time-of-flight mass spectrometer
NL2014415B1 (en) * 2015-03-06 2016-10-13 Jiaco Instr Holding B V System and method for decapsulation of plastic integrated circuit packages.
CN106102301B (zh) * 2016-07-29 2019-01-29 中国原子能科学研究院 紧凑型超导质子回旋加速器中可耐高压的静电偏转板
ES2696227B2 (es) * 2018-07-10 2019-06-12 Centro De Investig Energeticas Medioambientales Y Tecnologicas Ciemat Fuente de iones interna para ciclotrones de baja erosion

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3418206A (en) * 1963-04-29 1968-12-24 Boeing Co Particle accelerator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2475798A1 (fr) * 1980-02-13 1981-08-14 Commissariat Energie Atomique Procede et dispositif de production d'ions lourds fortement charges et une application mettant en oeuvre le procede
EP0334184A3 (en) * 1988-03-16 1989-11-29 Hitachi, Ltd. Microwave ion source

Also Published As

Publication number Publication date
DE2237252A1 (de) 1973-02-01
GB1352654A (en) 1974-05-08
US3778656A (en) 1973-12-11
DE7228091U (de) 1973-09-20

Similar Documents

Publication Publication Date Title
ATA136472A (show.php)
AR196074A1 (show.php)
AU2658571A (show.php)
AU2691671A (show.php)
AU2726271A (show.php)
AU2941471A (show.php)
AU2564071A (show.php)
AU2742671A (show.php)
AU2684071A (show.php)
AU2952271A (show.php)
AU2894671A (show.php)
AU3005371A (show.php)
AU2485671A (show.php)
AU2456871A (show.php)
AU1109576A (show.php)
AU2503871A (show.php)
AU2837671A (show.php)
AU2486471A (show.php)
AU2577671A (show.php)
AU2836771A (show.php)
AU2755871A (show.php)
AR192311Q (show.php)
AU2740271A (show.php)
AR199640Q (show.php)
AR202997Q (show.php)

Legal Events

Date Code Title Description
ST Notification of lapse