FR2137883B1 - - Google Patents
Info
- Publication number
- FR2137883B1 FR2137883B1 FR7217225A FR7217225A FR2137883B1 FR 2137883 B1 FR2137883 B1 FR 2137883B1 FR 7217225 A FR7217225 A FR 7217225A FR 7217225 A FR7217225 A FR 7217225A FR 2137883 B1 FR2137883 B1 FR 2137883B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- H01J37/243—Beam current control or regulation circuits
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3257771A JPS539058B1 (OSRAM) | 1971-05-15 | 1971-05-15 | |
| JP46081684A JPS4847263A (OSRAM) | 1971-10-18 | 1971-10-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2137883A1 FR2137883A1 (OSRAM) | 1972-12-29 |
| FR2137883B1 true FR2137883B1 (OSRAM) | 1981-11-20 |
Family
ID=26371162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7217225A Expired FR2137883B1 (OSRAM) | 1971-05-15 | 1972-05-15 |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE2223615B2 (OSRAM) |
| FR (1) | FR2137883B1 (OSRAM) |
| GB (1) | GB1378084A (OSRAM) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2140196A (en) * | 1983-05-05 | 1984-11-21 | Cambridge Instr Ltd | Particle beam lenses |
-
1972
- 1972-05-15 GB GB2269172A patent/GB1378084A/en not_active Expired
- 1972-05-15 FR FR7217225A patent/FR2137883B1/fr not_active Expired
- 1972-05-15 DE DE19722223615 patent/DE2223615B2/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB1378084A (en) | 1974-12-18 |
| DE2223615B2 (de) | 1973-09-13 |
| DE2223615A1 (de) | 1972-12-21 |
| FR2137883A1 (OSRAM) | 1972-12-29 |