FR2134220A1 - Procede en phase vapeur pour le recouvrement de surfaces au moyen de derives du titane - Google Patents

Procede en phase vapeur pour le recouvrement de surfaces au moyen de derives du titane

Info

Publication number
FR2134220A1
FR2134220A1 FR7115036A FR7115036A FR2134220A1 FR 2134220 A1 FR2134220 A1 FR 2134220A1 FR 7115036 A FR7115036 A FR 7115036A FR 7115036 A FR7115036 A FR 7115036A FR 2134220 A1 FR2134220 A1 FR 2134220A1
Authority
FR
France
Prior art keywords
covering
vapor phase
phase process
titanium derivatives
titanium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7115036A
Other languages
English (en)
Other versions
FR2134220B1 (fr
Inventor
Rene Paul Chevillon Jack
Maurice Celestin Alois Gauje Georges
Leopold Emile Grammagnac Jacques
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Aircraft Engines SAS
Original Assignee
Societe Nationale dEtude et de Construction de Moteurs dAviation SNECMA
SNECMA SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Societe Nationale dEtude et de Construction de Moteurs dAviation SNECMA, SNECMA SAS filed Critical Societe Nationale dEtude et de Construction de Moteurs dAviation SNECMA
Priority to FR7115036A priority Critical patent/FR2134220A1/fr
Priority to CH615572A priority patent/CH553257A/fr
Priority to GB1958472A priority patent/GB1357306A/en
Priority to IT6831272A priority patent/IT959117B/it
Publication of FR2134220A1 publication Critical patent/FR2134220A1/fr
Application granted granted Critical
Publication of FR2134220B1 publication Critical patent/FR2134220B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36—Carbonitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
FR7115036A 1971-04-27 1971-04-27 Procede en phase vapeur pour le recouvrement de surfaces au moyen de derives du titane Granted FR2134220A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR7115036A FR2134220A1 (fr) 1971-04-27 1971-04-27 Procede en phase vapeur pour le recouvrement de surfaces au moyen de derives du titane
CH615572A CH553257A (fr) 1971-04-27 1972-04-26 Procede en phase vapeur pour le recouvrement de surfaces au moyen de derives du titane.
GB1958472A GB1357306A (en) 1971-04-27 1972-04-27 Vapour phase process for covering surfaces
IT6831272A IT959117B (it) 1971-04-27 1972-04-27 Procedimento in fase di vapore per il ricoprimento di superfici mediante derivati del titanio

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7115036A FR2134220A1 (fr) 1971-04-27 1971-04-27 Procede en phase vapeur pour le recouvrement de surfaces au moyen de derives du titane

Publications (2)

Publication Number Publication Date
FR2134220A1 true FR2134220A1 (fr) 1972-12-08
FR2134220B1 FR2134220B1 (fr) 1973-12-28

Family

ID=9076021

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7115036A Granted FR2134220A1 (fr) 1971-04-27 1971-04-27 Procede en phase vapeur pour le recouvrement de surfaces au moyen de derives du titane

Country Status (4)

Country Link
CH (1) CH553257A (fr)
FR (1) FR2134220A1 (fr)
GB (1) GB1357306A (fr)
IT (1) IT959117B (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2486103A1 (fr) * 1980-07-02 1982-01-08 Zaets Inna Composition pour le revetement de metaux ferreux par diffusion a base de titane, d'oxyde d'aluminium et d'un halogenure d'ammonium
EP0104764A2 (fr) * 1982-08-27 1984-04-04 Anicon, Inc. Appareil et procédé pour le dépôt chimique à partir de la phase vapeur
FR2553436A1 (fr) * 1983-10-12 1985-04-19 Creusot Loire Procede de revetement chimique, en nickelure de titane, de pieces metalliques a base de nickel

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2486103A1 (fr) * 1980-07-02 1982-01-08 Zaets Inna Composition pour le revetement de metaux ferreux par diffusion a base de titane, d'oxyde d'aluminium et d'un halogenure d'ammonium
EP0104764A2 (fr) * 1982-08-27 1984-04-04 Anicon, Inc. Appareil et procédé pour le dépôt chimique à partir de la phase vapeur
EP0104764A3 (en) * 1982-08-27 1984-05-16 Anicon, Inc. Chemical vapor deposition apparatus and process
FR2553436A1 (fr) * 1983-10-12 1985-04-19 Creusot Loire Procede de revetement chimique, en nickelure de titane, de pieces metalliques a base de nickel

Also Published As

Publication number Publication date
GB1357306A (en) 1974-06-19
IT959117B (it) 1973-11-10
CH553257A (fr) 1974-08-30
FR2134220B1 (fr) 1973-12-28

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