FR2133571B1 - - Google Patents
Info
- Publication number
- FR2133571B1 FR2133571B1 FR7206396A FR7206396A FR2133571B1 FR 2133571 B1 FR2133571 B1 FR 2133571B1 FR 7206396 A FR7206396 A FR 7206396A FR 7206396 A FR7206396 A FR 7206396A FR 2133571 B1 FR2133571 B1 FR 2133571B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P32/00—Diffusion of dopants within, into or out of wafers, substrates or parts of devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/914—Doping
- Y10S438/92—Controlling diffusion profile by oxidation
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13400971A | 1971-04-14 | 1971-04-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2133571A1 FR2133571A1 (online.php) | 1972-12-01 |
| FR2133571B1 true FR2133571B1 (online.php) | 1978-03-03 |
Family
ID=22461342
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7206396A Expired FR2133571B1 (online.php) | 1971-04-14 | 1972-02-22 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3770521A (online.php) |
| JP (1) | JPS5310834B1 (online.php) |
| DE (1) | DE2209776C3 (online.php) |
| FR (1) | FR2133571B1 (online.php) |
| GB (1) | GB1357290A (online.php) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2751163C3 (de) * | 1977-11-16 | 1982-02-25 | Brown, Boveri & Cie Ag, 6800 Mannheim | Verfahren zur Steuerung einer offenen Gallium-Diffusion und Vorrichtung zur Durchführung desselben |
| US4149915A (en) * | 1978-01-27 | 1979-04-17 | International Business Machines Corporation | Process for producing defect-free semiconductor devices having overlapping high conductivity impurity regions |
| US5180690A (en) * | 1988-12-14 | 1993-01-19 | Energy Conversion Devices, Inc. | Method of forming a layer of doped crystalline semiconductor alloy material |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE550586A (online.php) * | 1955-12-02 | |||
| US3442725A (en) * | 1966-05-05 | 1969-05-06 | Motorola Inc | Phosphorus diffusion system |
| US3477887A (en) * | 1966-07-01 | 1969-11-11 | Motorola Inc | Gaseous diffusion method |
| US3484314A (en) * | 1967-02-23 | 1969-12-16 | Itt | Water vapor control in vapor-solid diffusion of boron |
| DE1644005A1 (de) * | 1967-04-26 | 1970-09-24 | Siemens Ag | Verfahren zum Dotieren von Halbleiterkristallen mit Phosphor |
-
1971
- 1971-04-14 US US00134009A patent/US3770521A/en not_active Expired - Lifetime
-
1972
- 1972-02-22 FR FR7206396A patent/FR2133571B1/fr not_active Expired
- 1972-03-01 DE DE2209776A patent/DE2209776C3/de not_active Expired
- 1972-03-16 GB GB1223272A patent/GB1357290A/en not_active Expired
- 1972-03-29 JP JP3081672A patent/JPS5310834B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US3770521A (en) | 1973-11-06 |
| FR2133571A1 (online.php) | 1972-12-01 |
| JPS5310834B1 (online.php) | 1978-04-17 |
| DE2209776C3 (de) | 1981-06-11 |
| DE2209776B2 (de) | 1979-12-06 |
| GB1357290A (en) | 1974-06-19 |
| DE2209776A1 (de) | 1972-10-19 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |