FR2128140B1 - - Google Patents

Info

Publication number
FR2128140B1
FR2128140B1 FR7107862A FR7107862A FR2128140B1 FR 2128140 B1 FR2128140 B1 FR 2128140B1 FR 7107862 A FR7107862 A FR 7107862A FR 7107862 A FR7107862 A FR 7107862A FR 2128140 B1 FR2128140 B1 FR 2128140B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7107862A
Other versions
FR2128140A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cegelec SA
Original Assignee
Cegelec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cegelec SA filed Critical Cegelec SA
Priority to FR7107862A priority Critical patent/FR2128140B1/fr
Priority to FR7143790A priority patent/FR2162249B2/fr
Priority to US00230929A priority patent/US3847776A/en
Publication of FR2128140A1 publication Critical patent/FR2128140A1/fr
Application granted granted Critical
Publication of FR2128140B1 publication Critical patent/FR2128140B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/2633—Bombardment with radiation with high-energy radiation for etching, e.g. sputteretching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Metallurgy (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Drying Of Semiconductors (AREA)
FR7107862A 1971-03-05 1971-03-05 Expired FR2128140B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR7107862A FR2128140B1 (fr) 1971-03-05 1971-03-05
FR7143790A FR2162249B2 (fr) 1971-03-05 1971-12-06
US00230929A US3847776A (en) 1971-03-05 1972-03-01 Method of preparing a pattern of a layer of refractory metal by masking

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR7107862A FR2128140B1 (fr) 1971-03-05 1971-03-05
FR7143790A FR2162249B2 (fr) 1971-03-05 1971-12-06

Publications (2)

Publication Number Publication Date
FR2128140A1 FR2128140A1 (fr) 1972-10-20
FR2128140B1 true FR2128140B1 (fr) 1976-04-16

Family

ID=26216252

Family Applications (2)

Application Number Title Priority Date Filing Date
FR7107862A Expired FR2128140B1 (fr) 1971-03-05 1971-03-05
FR7143790A Expired FR2162249B2 (fr) 1971-03-05 1971-12-06

Family Applications After (1)

Application Number Title Priority Date Filing Date
FR7143790A Expired FR2162249B2 (fr) 1971-03-05 1971-12-06

Country Status (2)

Country Link
US (1) US3847776A (fr)
FR (2) FR2128140B1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5061124A (fr) * 1973-09-28 1975-05-26
US3975252A (en) * 1975-03-14 1976-08-17 Bell Telephone Laboratories, Incorporated High-resolution sputter etching
US3994793A (en) * 1975-05-22 1976-11-30 International Business Machines Corporation Reactive ion etching of aluminum
CH633779A5 (de) * 1977-07-07 1982-12-31 Ciba Geigy Ag Verfahren zur herstellung neuer vinylaether und deren verwendung zur herstellung von polymeren.
US4343676A (en) * 1981-03-26 1982-08-10 Rca Corporation Etching a semiconductor material and automatically stopping same
US4388292A (en) * 1981-12-14 1983-06-14 United States Gypsum Company Process for reducing radioactive contamination in phosphogypsum
US4773971A (en) * 1986-10-30 1988-09-27 Hewlett-Packard Company Thin film mandrel

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3410774A (en) * 1965-10-23 1968-11-12 Ibm Method and apparatus for reverse sputtering selected electrically exposed areas of a cathodically biased workpiece
US3474021A (en) * 1966-01-12 1969-10-21 Ibm Method of forming openings using sequential sputtering and chemical etching
US3436327A (en) * 1966-07-18 1969-04-01 Collins Radio Co Selective sputtering rate circuit forming process
US3516914A (en) * 1968-02-26 1970-06-23 United Aircraft Corp Aluminum masking of active components during tantalum/nitride sputtering

Also Published As

Publication number Publication date
FR2162249A2 (fr) 1973-07-20
US3847776A (en) 1974-11-12
FR2128140A1 (fr) 1972-10-20
FR2162249B2 (fr) 1977-08-05

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse