FR2117014A5 - - Google Patents

Info

Publication number
FR2117014A5
FR2117014A5 FR7111945A FR7111945A FR2117014A5 FR 2117014 A5 FR2117014 A5 FR 2117014A5 FR 7111945 A FR7111945 A FR 7111945A FR 7111945 A FR7111945 A FR 7111945A FR 2117014 A5 FR2117014 A5 FR 2117014A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7111945A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Doall Co
Original Assignee
Doall Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Doall Co filed Critical Doall Co
Application granted granted Critical
Publication of FR2117014A5 publication Critical patent/FR2117014A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02061—Reduction or prevention of effects of tilts or misalignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
FR7111945A 1970-08-10 1971-04-05 Expired FR2117014A5 (Direct)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6247970A 1970-08-10 1970-08-10

Publications (1)

Publication Number Publication Date
FR2117014A5 true FR2117014A5 (Direct) 1972-07-21

Family

ID=22042773

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7111945A Expired FR2117014A5 (Direct) 1970-08-10 1971-04-05

Country Status (4)

Country Link
BE (1) BE765248A (Direct)
DE (1) DE2123667A1 (Direct)
FR (1) FR2117014A5 (Direct)
NL (1) NL7107593A (Direct)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3351527B2 (ja) 1991-11-08 2002-11-25 ブリテイッシュ・テクノロジー・グループ・リミテッド 計測装置

Also Published As

Publication number Publication date
DE2123667A1 (de) 1972-02-17
NL7107593A (Direct) 1972-02-14
BE765248A (fr) 1971-08-30

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Legal Events

Date Code Title Description
ST Notification of lapse