FR2106298A5 - - Google Patents
Info
- Publication number
- FR2106298A5 FR2106298A5 FR7133791A FR7133791A FR2106298A5 FR 2106298 A5 FR2106298 A5 FR 2106298A5 FR 7133791 A FR7133791 A FR 7133791A FR 7133791 A FR7133791 A FR 7133791A FR 2106298 A5 FR2106298 A5 FR 2106298A5
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3007—Electron or ion-optical systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G15/00—Apparatus for electrographic processes using a charge pattern
- G03G15/22—Apparatus for electrographic processes using a charge pattern involving the combination of more than one step according to groups G03G13/02 - G03G13/20
- G03G15/32—Apparatus for electrographic processes using a charge pattern involving the combination of more than one step according to groups G03G13/02 - G03G13/20 in which the charge pattern is formed dotwise, e.g. by a thermal head
- G03G15/321—Apparatus for electrographic processes using a charge pattern involving the combination of more than one step according to groups G03G13/02 - G03G13/20 in which the charge pattern is formed dotwise, e.g. by a thermal head by charge transfer onto the recording material in accordance with the image
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/12—Lenses electrostatic
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/027—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed by irradiation, e.g. by photons, alpha or beta particles
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/09—Treatments involving charged particles
- H05K2203/092—Particle beam, e.g. using an electron beam or an ion beam
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/10—Using electric, magnetic and electromagnetic fields; Using laser light
- H05K2203/107—Using laser light
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electron Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US7389870A | 1970-09-21 | 1970-09-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2106298A5 true FR2106298A5 (fr) | 1972-04-28 |
Family
ID=22116466
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7133791A Expired FR2106298A5 (fr) | 1970-09-21 | 1971-09-20 |
Country Status (5)
Country | Link |
---|---|
US (1) | US3614423A (fr) |
DE (1) | DE2146941A1 (fr) |
FR (1) | FR2106298A5 (fr) |
GB (1) | GB1328320A (fr) |
NL (1) | NL7112975A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0001042A1 (fr) * | 1977-09-02 | 1979-03-21 | International Business Machines Corporation | Procédé et dispositif pour l'exposition par projection d'ombre de rayons corpusculaires |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3689782A (en) * | 1971-07-01 | 1972-09-05 | Thomson Csf | Electronic transducer for a piezoelectric line |
DE2446789A1 (de) * | 1974-09-27 | 1976-09-02 | Siemens Ag | Korpuskularstrahloptisches geraet zur korpuskelbestrahlung eines praeparats |
US3924136A (en) * | 1975-02-18 | 1975-12-02 | Stanford Research Inst | Charged particle apodized pattern imaging and exposure system |
DE2644208C3 (de) * | 1976-09-30 | 1981-04-30 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur Herstellung einer einkristallinen Schicht auf einer Unterlage |
FR2391538A1 (fr) * | 1977-05-16 | 1978-12-15 | Asahi Chemical Ind | Resistance en couche mince et procede de fabrication |
US4446373A (en) * | 1981-01-12 | 1984-05-01 | Sony Corporation | Process and apparatus for converged fine line electron beam treatment objects |
US4382186A (en) * | 1981-01-12 | 1983-05-03 | Energy Sciences Inc. | Process and apparatus for converged fine line electron beam treatment of objects |
US4465934A (en) * | 1981-01-23 | 1984-08-14 | Veeco Instruments Inc. | Parallel charged particle beam exposure system |
US4703256A (en) * | 1983-05-09 | 1987-10-27 | Sony Corporation | Faraday cups |
US4559102A (en) * | 1983-05-09 | 1985-12-17 | Sony Corporation | Method for recrystallizing a polycrystalline, amorphous or small grain material |
US4592799A (en) * | 1983-05-09 | 1986-06-03 | Sony Corporation | Method of recrystallizing a polycrystalline, amorphous or small grain material |
GB8911391D0 (en) * | 1989-05-18 | 1989-07-05 | Humphreys Colin J | Preparation of substrates |
US8878147B2 (en) * | 2010-09-07 | 2014-11-04 | Joseph C. Robinson | Method and apparatus for in situ preparation of serial planar surfaces for microscopy |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3491236A (en) * | 1967-09-28 | 1970-01-20 | Gen Electric | Electron beam fabrication of microelectronic circuit patterns |
-
1970
- 1970-09-21 US US73898A patent/US3614423A/en not_active Expired - Lifetime
-
1971
- 1971-09-09 GB GB4203671A patent/GB1328320A/en not_active Expired
- 1971-09-20 DE DE19712146941 patent/DE2146941A1/de active Pending
- 1971-09-20 FR FR7133791A patent/FR2106298A5/fr not_active Expired
- 1971-09-21 NL NL7112975A patent/NL7112975A/xx unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0001042A1 (fr) * | 1977-09-02 | 1979-03-21 | International Business Machines Corporation | Procédé et dispositif pour l'exposition par projection d'ombre de rayons corpusculaires |
Also Published As
Publication number | Publication date |
---|---|
GB1328320A (en) | 1973-08-30 |
NL7112975A (fr) | 1972-03-23 |
DE2146941A1 (de) | 1972-03-30 |
US3614423A (en) | 1971-10-19 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |