US3989938A
(en)
*
|
1972-06-23 |
1976-11-02 |
Eocom Corporation |
Interferometer spectrometer for discrete frequency analysis of emission or absorption spectra and method
|
USRE31941E
(en)
*
|
1974-02-13 |
1985-07-09 |
The Gerber Scientific Instrument Company |
Multiplex interferometer
|
US3977787A
(en)
*
|
1975-05-05 |
1976-08-31 |
Nasa |
High-resolution fourier interferometer-spectrophotopolarimeter
|
US4681450A
(en)
*
|
1985-06-21 |
1987-07-21 |
Research Corporation |
Photodetector arrangement for measuring the state of polarization of light
|
US7830587B2
(en)
|
1993-03-17 |
2010-11-09 |
Qualcomm Mems Technologies, Inc. |
Method and device for modulating light with semiconductor substrate
|
US6674562B1
(en)
*
|
1994-05-05 |
2004-01-06 |
Iridigm Display Corporation |
Interferometric modulation of radiation
|
US7808694B2
(en)
|
1994-05-05 |
2010-10-05 |
Qualcomm Mems Technologies, Inc. |
Method and device for modulating light
|
US7826120B2
(en)
*
|
1994-05-05 |
2010-11-02 |
Qualcomm Mems Technologies, Inc. |
Method and device for multi-color interferometric modulation
|
US7776631B2
(en)
|
1994-05-05 |
2010-08-17 |
Qualcomm Mems Technologies, Inc. |
MEMS device and method of forming a MEMS device
|
US8014059B2
(en)
|
1994-05-05 |
2011-09-06 |
Qualcomm Mems Technologies, Inc. |
System and method for charge control in a MEMS device
|
US7852545B2
(en)
*
|
1994-05-05 |
2010-12-14 |
Qualcomm Mems Technologies, Inc. |
Method and device for modulating light
|
US7460291B2
(en)
*
|
1994-05-05 |
2008-12-02 |
Idc, Llc |
Separable modulator
|
US7800809B2
(en)
*
|
1994-05-05 |
2010-09-21 |
Qualcomm Mems Technologies, Inc. |
System and method for a MEMS device
|
US7738157B2
(en)
|
1994-05-05 |
2010-06-15 |
Qualcomm Mems Technologies, Inc. |
System and method for a MEMS device
|
US7839556B2
(en)
*
|
1994-05-05 |
2010-11-23 |
Qualcomm Mems Technologies, Inc. |
Method and device for modulating light
|
US8081369B2
(en)
*
|
1994-05-05 |
2011-12-20 |
Qualcomm Mems Technologies, Inc. |
System and method for a MEMS device
|
US7898722B2
(en)
*
|
1995-05-01 |
2011-03-01 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical device with restoring electrode
|
US7929197B2
(en)
*
|
1996-11-05 |
2011-04-19 |
Qualcomm Mems Technologies, Inc. |
System and method for a MEMS device
|
US7471444B2
(en)
|
1996-12-19 |
2008-12-30 |
Idc, Llc |
Interferometric modulation of radiation
|
US7830588B2
(en)
*
|
1996-12-19 |
2010-11-09 |
Qualcomm Mems Technologies, Inc. |
Method of making a light modulating display device and associated transistor circuitry and structures thereof
|
US8928967B2
(en)
|
1998-04-08 |
2015-01-06 |
Qualcomm Mems Technologies, Inc. |
Method and device for modulating light
|
US7532377B2
(en)
|
1998-04-08 |
2009-05-12 |
Idc, Llc |
Movable micro-electromechanical device
|
WO1999052006A2
(fr)
|
1998-04-08 |
1999-10-14 |
Etalon, Inc. |
Modulation interferometrique de rayonnement
|
WO2003007049A1
(fr)
|
1999-10-05 |
2003-01-23 |
Iridigm Display Corporation |
Mems et structures photoniques
|
US6941032B2
(en)
*
|
2000-06-21 |
2005-09-06 |
Pirelli Cavi E Sistemi S.P.A. |
Passive polarization stabilizer
|
US6794119B2
(en)
|
2002-02-12 |
2004-09-21 |
Iridigm Display Corporation |
Method for fabricating a structure for a microelectromechanical systems (MEMS) device
|
WO2005047849A2
(fr)
*
|
2003-08-21 |
2005-05-26 |
Biotools, Inc. |
Procedes et appareil de mesure amelioree du dichroisme circulaire et lineaire et utilisations de ceux-ci
|
US7476327B2
(en)
|
2004-05-04 |
2009-01-13 |
Idc, Llc |
Method of manufacture for microelectromechanical devices
|
US7522283B2
(en)
*
|
2004-08-23 |
2009-04-21 |
Biotools, Inc. |
Methods and apparatus for the improved measurement of circular and linear dichroism and uses thereof
|
US7527995B2
(en)
|
2004-09-27 |
2009-05-05 |
Qualcomm Mems Technologies, Inc. |
Method of making prestructure for MEMS systems
|
US8008736B2
(en)
|
2004-09-27 |
2011-08-30 |
Qualcomm Mems Technologies, Inc. |
Analog interferometric modulator device
|
US7612932B2
(en)
|
2004-09-27 |
2009-11-03 |
Idc, Llc |
Microelectromechanical device with optical function separated from mechanical and electrical function
|
US7369296B2
(en)
*
|
2004-09-27 |
2008-05-06 |
Idc, Llc |
Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
|
US7564612B2
(en)
|
2004-09-27 |
2009-07-21 |
Idc, Llc |
Photonic MEMS and structures
|
US7289259B2
(en)
*
|
2004-09-27 |
2007-10-30 |
Idc, Llc |
Conductive bus structure for interferometric modulator array
|
US7130104B2
(en)
|
2004-09-27 |
2006-10-31 |
Idc, Llc |
Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
|
US7944599B2
(en)
|
2004-09-27 |
2011-05-17 |
Qualcomm Mems Technologies, Inc. |
Electromechanical device with optical function separated from mechanical and electrical function
|
US7304784B2
(en)
|
2004-09-27 |
2007-12-04 |
Idc, Llc |
Reflective display device having viewable display on both sides
|
US7554714B2
(en)
|
2004-09-27 |
2009-06-30 |
Idc, Llc |
Device and method for manipulation of thermal response in a modulator
|
US7936497B2
(en)
|
2004-09-27 |
2011-05-03 |
Qualcomm Mems Technologies, Inc. |
MEMS device having deformable membrane characterized by mechanical persistence
|
US7630119B2
(en)
*
|
2004-09-27 |
2009-12-08 |
Qualcomm Mems Technologies, Inc. |
Apparatus and method for reducing slippage between structures in an interferometric modulator
|
US7417783B2
(en)
*
|
2004-09-27 |
2008-08-26 |
Idc, Llc |
Mirror and mirror layer for optical modulator and method
|
US7583429B2
(en)
|
2004-09-27 |
2009-09-01 |
Idc, Llc |
Ornamental display device
|
US7321456B2
(en)
|
2004-09-27 |
2008-01-22 |
Idc, Llc |
Method and device for corner interferometric modulation
|
US7302157B2
(en)
|
2004-09-27 |
2007-11-27 |
Idc, Llc |
System and method for multi-level brightness in interferometric modulation
|
US7420725B2
(en)
|
2004-09-27 |
2008-09-02 |
Idc, Llc |
Device having a conductive light absorbing mask and method for fabricating same
|
US7372613B2
(en)
*
|
2004-09-27 |
2008-05-13 |
Idc, Llc |
Method and device for multistate interferometric light modulation
|
US7884989B2
(en)
*
|
2005-05-27 |
2011-02-08 |
Qualcomm Mems Technologies, Inc. |
White interferometric modulators and methods for forming the same
|
US7460292B2
(en)
*
|
2005-06-03 |
2008-12-02 |
Qualcomm Mems Technologies, Inc. |
Interferometric modulator with internal polarization and drive method
|
EP1910218A1
(fr)
|
2005-07-22 |
2008-04-16 |
Qualcomm Mems Technologies, Inc. |
Dispositifs de microsysteme electromecanique comportant des structures de support et leurs procedes de fabrication
|
EP2495212A3
(fr)
*
|
2005-07-22 |
2012-10-31 |
QUALCOMM MEMS Technologies, Inc. |
Dispositifs MEMS comportant des structures de support et procédés de fabrication associés
|
US7630114B2
(en)
|
2005-10-28 |
2009-12-08 |
Idc, Llc |
Diffusion barrier layer for MEMS devices
|
US7916980B2
(en)
*
|
2006-01-13 |
2011-03-29 |
Qualcomm Mems Technologies, Inc. |
Interconnect structure for MEMS device
|
US7382515B2
(en)
*
|
2006-01-18 |
2008-06-03 |
Qualcomm Mems Technologies, Inc. |
Silicon-rich silicon nitrides as etch stops in MEMS manufacture
|
US7550810B2
(en)
|
2006-02-23 |
2009-06-23 |
Qualcomm Mems Technologies, Inc. |
MEMS device having a layer movable at asymmetric rates
|
US7711239B2
(en)
*
|
2006-04-19 |
2010-05-04 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical device and method utilizing nanoparticles
|
US7417784B2
(en)
|
2006-04-19 |
2008-08-26 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical device and method utilizing a porous surface
|
US7623287B2
(en)
|
2006-04-19 |
2009-11-24 |
Qualcomm Mems Technologies, Inc. |
Non-planar surface structures and process for microelectromechanical systems
|
US7649671B2
(en)
|
2006-06-01 |
2010-01-19 |
Qualcomm Mems Technologies, Inc. |
Analog interferometric modulator device with electrostatic actuation and release
|
US7835061B2
(en)
|
2006-06-28 |
2010-11-16 |
Qualcomm Mems Technologies, Inc. |
Support structures for free-standing electromechanical devices
|
US7527998B2
(en)
|
2006-06-30 |
2009-05-05 |
Qualcomm Mems Technologies, Inc. |
Method of manufacturing MEMS devices providing air gap control
|
US7629197B2
(en)
*
|
2006-10-18 |
2009-12-08 |
Qualcomm Mems Technologies, Inc. |
Spatial light modulator
|
US7545552B2
(en)
*
|
2006-10-19 |
2009-06-09 |
Qualcomm Mems Technologies, Inc. |
Sacrificial spacer process and resultant structure for MEMS support structure
|
US7706042B2
(en)
|
2006-12-20 |
2010-04-27 |
Qualcomm Mems Technologies, Inc. |
MEMS device and interconnects for same
|
US8115987B2
(en)
|
2007-02-01 |
2012-02-14 |
Qualcomm Mems Technologies, Inc. |
Modulating the intensity of light from an interferometric reflector
|
US7742220B2
(en)
*
|
2007-03-28 |
2010-06-22 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical device and method utilizing conducting layers separated by stops
|
US7643202B2
(en)
*
|
2007-05-09 |
2010-01-05 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical system having a dielectric movable membrane and a mirror
|
US7715085B2
(en)
|
2007-05-09 |
2010-05-11 |
Qualcomm Mems Technologies, Inc. |
Electromechanical system having a dielectric movable membrane and a mirror
|
US7719752B2
(en)
|
2007-05-11 |
2010-05-18 |
Qualcomm Mems Technologies, Inc. |
MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
|
US7625825B2
(en)
*
|
2007-06-14 |
2009-12-01 |
Qualcomm Mems Technologies, Inc. |
Method of patterning mechanical layer for MEMS structures
|
US7643199B2
(en)
|
2007-06-19 |
2010-01-05 |
Qualcomm Mems Technologies, Inc. |
High aperture-ratio top-reflective AM-iMod displays
|
US7782517B2
(en)
*
|
2007-06-21 |
2010-08-24 |
Qualcomm Mems Technologies, Inc. |
Infrared and dual mode displays
|
US7630121B2
(en)
|
2007-07-02 |
2009-12-08 |
Qualcomm Mems Technologies, Inc. |
Electromechanical device with optical function separated from mechanical and electrical function
|
US8068268B2
(en)
*
|
2007-07-03 |
2011-11-29 |
Qualcomm Mems Technologies, Inc. |
MEMS devices having improved uniformity and methods for making them
|
KR20100066452A
(ko)
|
2007-07-31 |
2010-06-17 |
퀄컴 엠이엠스 테크놀로지스, 인크. |
간섭계 변조기의 색 변이를 증강시키는 장치
|
US8072402B2
(en)
*
|
2007-08-29 |
2011-12-06 |
Qualcomm Mems Technologies, Inc. |
Interferometric optical modulator with broadband reflection characteristics
|
US7773286B2
(en)
*
|
2007-09-14 |
2010-08-10 |
Qualcomm Mems Technologies, Inc. |
Periodic dimple array
|
US7847999B2
(en)
*
|
2007-09-14 |
2010-12-07 |
Qualcomm Mems Technologies, Inc. |
Interferometric modulator display devices
|
US20090078316A1
(en)
*
|
2007-09-24 |
2009-03-26 |
Qualcomm Incorporated |
Interferometric photovoltaic cell
|
US8058549B2
(en)
|
2007-10-19 |
2011-11-15 |
Qualcomm Mems Technologies, Inc. |
Photovoltaic devices with integrated color interferometric film stacks
|
CN101828146B
(zh)
|
2007-10-19 |
2013-05-01 |
高通Mems科技公司 |
具有集成光伏装置的显示器
|
WO2009055393A1
(fr)
|
2007-10-23 |
2009-04-30 |
Qualcomm Mems Technologies, Inc. |
Dispositifs basés sur des mems présentant des propriétés de transmission réglables
|
US8941631B2
(en)
|
2007-11-16 |
2015-01-27 |
Qualcomm Mems Technologies, Inc. |
Simultaneous light collection and illumination on an active display
|
US7715079B2
(en)
*
|
2007-12-07 |
2010-05-11 |
Qualcomm Mems Technologies, Inc. |
MEMS devices requiring no mechanical support
|
US7863079B2
(en)
|
2008-02-05 |
2011-01-04 |
Qualcomm Mems Technologies, Inc. |
Methods of reducing CD loss in a microelectromechanical device
|
US8164821B2
(en)
|
2008-02-22 |
2012-04-24 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical device with thermal expansion balancing layer or stiffening layer
|
US7944604B2
(en)
*
|
2008-03-07 |
2011-05-17 |
Qualcomm Mems Technologies, Inc. |
Interferometric modulator in transmission mode
|
US7612933B2
(en)
|
2008-03-27 |
2009-11-03 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical device with spacing layer
|
US7898723B2
(en)
*
|
2008-04-02 |
2011-03-01 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical systems display element with photovoltaic structure
|
US7969638B2
(en)
*
|
2008-04-10 |
2011-06-28 |
Qualcomm Mems Technologies, Inc. |
Device having thin black mask and method of fabricating the same
|
US7768690B2
(en)
|
2008-06-25 |
2010-08-03 |
Qualcomm Mems Technologies, Inc. |
Backlight displays
|
US8023167B2
(en)
|
2008-06-25 |
2011-09-20 |
Qualcomm Mems Technologies, Inc. |
Backlight displays
|
US7746539B2
(en)
*
|
2008-06-25 |
2010-06-29 |
Qualcomm Mems Technologies, Inc. |
Method for packing a display device and the device obtained thereof
|
US7859740B2
(en)
*
|
2008-07-11 |
2010-12-28 |
Qualcomm Mems Technologies, Inc. |
Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control
|
US7855826B2
(en)
|
2008-08-12 |
2010-12-21 |
Qualcomm Mems Technologies, Inc. |
Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices
|
US8358266B2
(en)
*
|
2008-09-02 |
2013-01-22 |
Qualcomm Mems Technologies, Inc. |
Light turning device with prismatic light turning features
|
US8270056B2
(en)
|
2009-03-23 |
2012-09-18 |
Qualcomm Mems Technologies, Inc. |
Display device with openings between sub-pixels and method of making same
|
WO2010138765A1
(fr)
|
2009-05-29 |
2010-12-02 |
Qualcomm Mems Technologies, Inc. |
Dispositifs d'éclairage et procédés de fabrication associés
|
WO2010148282A2
(fr)
*
|
2009-06-18 |
2010-12-23 |
Paul Prucnal |
Commutateur optique utilisant un interféromètre de michelson
|
US8270062B2
(en)
*
|
2009-09-17 |
2012-09-18 |
Qualcomm Mems Technologies, Inc. |
Display device with at least one movable stop element
|
US8488228B2
(en)
*
|
2009-09-28 |
2013-07-16 |
Qualcomm Mems Technologies, Inc. |
Interferometric display with interferometric reflector
|
EP2556403A1
(fr)
|
2010-04-09 |
2013-02-13 |
Qualcomm Mems Technologies, Inc. |
Couche mécanique d'un dispositif électromécanique et ses procédés de formation
|
US8848294B2
(en)
|
2010-05-20 |
2014-09-30 |
Qualcomm Mems Technologies, Inc. |
Method and structure capable of changing color saturation
|
JP2013544370A
(ja)
|
2010-08-17 |
2013-12-12 |
クォルコム・メムズ・テクノロジーズ・インコーポレーテッド |
干渉ディスプレイデバイスの電荷中性電極の作動及び較正
|
US9057872B2
(en)
|
2010-08-31 |
2015-06-16 |
Qualcomm Mems Technologies, Inc. |
Dielectric enhanced mirror for IMOD display
|
US8670171B2
(en)
|
2010-10-18 |
2014-03-11 |
Qualcomm Mems Technologies, Inc. |
Display having an embedded microlens array
|
US8963159B2
(en)
|
2011-04-04 |
2015-02-24 |
Qualcomm Mems Technologies, Inc. |
Pixel via and methods of forming the same
|
US9134527B2
(en)
|
2011-04-04 |
2015-09-15 |
Qualcomm Mems Technologies, Inc. |
Pixel via and methods of forming the same
|
US8659816B2
(en)
|
2011-04-25 |
2014-02-25 |
Qualcomm Mems Technologies, Inc. |
Mechanical layer and methods of making the same
|
US8736939B2
(en)
|
2011-11-04 |
2014-05-27 |
Qualcomm Mems Technologies, Inc. |
Matching layer thin-films for an electromechanical systems reflective display device
|