Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
  • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
  • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
  • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
  • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
  • H01L21/3063—Electrolytic etching
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10S438/00—Semiconductor device manufacturing: process
  • Y10S438/914—Doping
  • Y10S438/924—To facilitate selective etching

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• Engineering & Computer Science (AREA)
• Physics & Mathematics (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Weting (AREA)
• Drying Of Semiconductors (AREA)
• Bipolar Transistors (AREA)

Applications Claiming Priority (1)

Publications (2)

Family

ID=22026542

Family Applications (1)

Country Status (11)

Families Citing this family (4)

Family Cites Families (3)

• 1970
  • 1970-07-31 US US59977A patent/US3642593A/en not_active Expired - Lifetime
• 1971
  • 1971-07-23 SE SE09510/71A patent/SE362015B/xx unknown
  • 1971-07-26 CH CH1098971A patent/CH530093A/de not_active IP Right Cessation
  • 1971-07-26 IE IE945/71A patent/IE35540B1/xx unknown
  • 1971-07-26 AU AU31653/71A patent/AU432312B2/en not_active Expired
  • 1971-07-27 ES ES394152A patent/ES394152A1/es not_active Expired
  • 1971-07-27 BE BE770538A patent/BE770538A/xx unknown
  • 1971-07-29 GB GB3572471A patent/GB1307030A/en not_active Expired
  • 1971-07-30 JP JP46056840A patent/JPS517980B1/ja active Pending
  • 1971-07-30 FR FR7128158A patent/FR2099721B1/fr not_active Expired
  • 1971-07-30 NL NL717110572A patent/NL152705B/xx not_active IP Right Cessation

Non-Patent Citations (1)

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