FR2096876A1 - - Google Patents

Info

Publication number
FR2096876A1
FR2096876A1 FR7025558A FR7025558A FR2096876A1 FR 2096876 A1 FR2096876 A1 FR 2096876A1 FR 7025558 A FR7025558 A FR 7025558A FR 7025558 A FR7025558 A FR 7025558A FR 2096876 A1 FR2096876 A1 FR 2096876A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7025558A
Other languages
French (fr)
Other versions
FR2096876B1 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Priority to FR707025558A priority Critical patent/FR2096876B1/fr
Priority to GB3200071A priority patent/GB1359707A/en
Publication of FR2096876A1 publication Critical patent/FR2096876A1/fr
Application granted granted Critical
Publication of FR2096876B1 publication Critical patent/FR2096876B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/2633—Bombardment with radiation with high-energy radiation for etching, e.g. sputteretching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Bipolar Transistors (AREA)
FR707025558A 1970-07-09 1970-07-09 Expired FR2096876B1 (enrdf_load_stackoverflow)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR707025558A FR2096876B1 (enrdf_load_stackoverflow) 1970-07-09 1970-07-09
GB3200071A GB1359707A (en) 1970-07-09 1971-07-07 Transistor for operation at very high frequencies and a method for the manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR707025558A FR2096876B1 (enrdf_load_stackoverflow) 1970-07-09 1970-07-09

Publications (2)

Publication Number Publication Date
FR2096876A1 true FR2096876A1 (enrdf_load_stackoverflow) 1972-03-03
FR2096876B1 FR2096876B1 (enrdf_load_stackoverflow) 1973-08-10

Family

ID=9058531

Family Applications (1)

Application Number Title Priority Date Filing Date
FR707025558A Expired FR2096876B1 (enrdf_load_stackoverflow) 1970-07-09 1970-07-09

Country Status (2)

Country Link
FR (1) FR2096876B1 (enrdf_load_stackoverflow)
GB (1) GB1359707A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0007667A1 (en) * 1978-07-31 1980-02-06 Philips Electronics Uk Limited Infra-red detector elements and their manufacture

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2855864A1 (de) * 1978-12-22 1980-07-10 Ibm Deutschland Ionenquelle, insbesondere fuer ionenimplantationsanlagen
US4259145A (en) * 1979-06-29 1981-03-31 International Business Machines Corporation Ion source for reactive ion etching

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1573306A (enrdf_load_stackoverflow) * 1967-05-26 1969-07-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1573306A (enrdf_load_stackoverflow) * 1967-05-26 1969-07-04

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
REVUE AMERICAINE "IBM TECHNICAL DISCLOSURE BULLETIN" VOL.9, JUIN 1966 "STRIPPING PHOTORESIST FILMS AFTER SPUTTER ETCHING" R.P.ESCH ET AL, PAGE 6 *
REVUE AMERICAINE "SOLID STATE TECHNOLOGY" VOL.12, JUILLET 1969 "IC PATTERN EXPOSURE BY SCANNING ELECTRON BEAM APPARATUS" S.MIYAUCHI ET AL, PAGES 43-48 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0007667A1 (en) * 1978-07-31 1980-02-06 Philips Electronics Uk Limited Infra-red detector elements and their manufacture

Also Published As

Publication number Publication date
FR2096876B1 (enrdf_load_stackoverflow) 1973-08-10
GB1359707A (en) 1974-07-10

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Legal Events

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ST Notification of lapse