FR2096551B1 - - Google Patents

Info

Publication number
FR2096551B1
FR2096551B1 FR717122322A FR7122322A FR2096551B1 FR 2096551 B1 FR2096551 B1 FR 2096551B1 FR 717122322 A FR717122322 A FR 717122322A FR 7122322 A FR7122322 A FR 7122322A FR 2096551 B1 FR2096551 B1 FR 2096551B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR717122322A
Other versions
FR2096551A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GENEVOISE INSTR PHYSIQUE
Original Assignee
GENEVOISE INSTR PHYSIQUE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GENEVOISE INSTR PHYSIQUE filed Critical GENEVOISE INSTR PHYSIQUE
Publication of FR2096551A1 publication Critical patent/FR2096551A1/fr
Application granted granted Critical
Publication of FR2096551B1 publication Critical patent/FR2096551B1/fr
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/04Measuring microscopes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR717122322A 1970-06-29 1971-06-18 Expired FR2096551B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH976570A CH526090A (fr) 1970-06-29 1970-06-29 Microscope photoélectrique à affichage numérique

Publications (2)

Publication Number Publication Date
FR2096551A1 FR2096551A1 (fr) 1972-02-18
FR2096551B1 true FR2096551B1 (fr) 1974-02-15

Family

ID=4355433

Family Applications (1)

Application Number Title Priority Date Filing Date
FR717122322A Expired FR2096551B1 (fr) 1970-06-29 1971-06-18

Country Status (5)

Country Link
US (1) US3724959A (fr)
CH (1) CH526090A (fr)
DE (1) DE2132286A1 (fr)
FR (1) FR2096551B1 (fr)
GB (1) GB1301626A (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RO71070A2 (fr) * 1976-04-24 1985-11-30 Intreprinderea De Mecanica Fina,Ro Methode et appareil pour l'etalonnage des comparateurs a cadran
GB2014754B (en) * 1978-02-17 1982-06-16 Polska Akademia Nauk Instytut Interferometer
DD220698A1 (de) * 1983-08-03 1985-04-03 Ilmenau Tech Hochschule Vorrichtung insbesondere zur wegmessung
GB2154019B (en) * 1984-02-10 1988-01-13 Zeiss Jena Veb Carl Double-beam interferometer arrangement particularly for fourier-transform spectrometers
US4959552A (en) * 1988-02-09 1990-09-25 Carl-Zeiss-Stiftung Microscope arranged for measuring microscopic structures
JPH0540224A (ja) * 1990-07-26 1993-02-19 Fuji Photo Film Co Ltd 走査型顕微鏡
JP2884041B2 (ja) * 1994-11-01 1999-04-19 工業技術院長 非接触式相対変位測定法及び測定装置
US5822875A (en) * 1995-08-09 1998-10-20 Siemens Aktiengesellschaft Scanning electron microscopic ruler and method
US6842252B1 (en) 2000-11-15 2005-01-11 Burleigh Products Group, Inc. Laser wavelength meter
DE102007053124B3 (de) * 2007-11-08 2009-01-29 Carl Mahr Holding Gmbh Kompaktes Linnik-Interferometer

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1303574B (de) * 1962-06-06 1972-04-27 Manufacture De Vilebrequins De Lorette Längenmeß vorrichtung
US3560097A (en) * 1967-05-03 1971-02-02 Anatoly Alexandrovich Gavrilki Photoelectric microscope
US3604810A (en) * 1968-06-14 1971-09-14 Jenoptik Jena Gmbh Veb Apparatus for the objective localization of an object relative to a scale carrier

Also Published As

Publication number Publication date
US3724959A (en) 1973-04-03
FR2096551A1 (fr) 1972-02-18
CH526090A (fr) 1972-07-31
GB1301626A (fr) 1973-01-04
DE2132286A1 (de) 1972-01-13

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Legal Events

Date Code Title Description
ST Notification of lapse