FR2096551B1 - - Google Patents
Info
- Publication number
- FR2096551B1 FR2096551B1 FR717122322A FR7122322A FR2096551B1 FR 2096551 B1 FR2096551 B1 FR 2096551B1 FR 717122322 A FR717122322 A FR 717122322A FR 7122322 A FR7122322 A FR 7122322A FR 2096551 B1 FR2096551 B1 FR 2096551B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/04—Measuring microscopes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH976570A CH526090A (fr) | 1970-06-29 | 1970-06-29 | Microscope photoélectrique à affichage numérique |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2096551A1 FR2096551A1 (fr) | 1972-02-18 |
FR2096551B1 true FR2096551B1 (fr) | 1974-02-15 |
Family
ID=4355433
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR717122322A Expired FR2096551B1 (fr) | 1970-06-29 | 1971-06-18 |
Country Status (5)
Country | Link |
---|---|
US (1) | US3724959A (fr) |
CH (1) | CH526090A (fr) |
DE (1) | DE2132286A1 (fr) |
FR (1) | FR2096551B1 (fr) |
GB (1) | GB1301626A (fr) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RO71070A2 (fr) * | 1976-04-24 | 1985-11-30 | Intreprinderea De Mecanica Fina,Ro | Methode et appareil pour l'etalonnage des comparateurs a cadran |
GB2014754B (en) * | 1978-02-17 | 1982-06-16 | Polska Akademia Nauk Instytut | Interferometer |
DD220698A1 (de) * | 1983-08-03 | 1985-04-03 | Ilmenau Tech Hochschule | Vorrichtung insbesondere zur wegmessung |
GB2154019B (en) * | 1984-02-10 | 1988-01-13 | Zeiss Jena Veb Carl | Double-beam interferometer arrangement particularly for fourier-transform spectrometers |
US4959552A (en) * | 1988-02-09 | 1990-09-25 | Carl-Zeiss-Stiftung | Microscope arranged for measuring microscopic structures |
JPH0540224A (ja) * | 1990-07-26 | 1993-02-19 | Fuji Photo Film Co Ltd | 走査型顕微鏡 |
JP2884041B2 (ja) * | 1994-11-01 | 1999-04-19 | 工業技術院長 | 非接触式相対変位測定法及び測定装置 |
US5822875A (en) * | 1995-08-09 | 1998-10-20 | Siemens Aktiengesellschaft | Scanning electron microscopic ruler and method |
US6842252B1 (en) | 2000-11-15 | 2005-01-11 | Burleigh Products Group, Inc. | Laser wavelength meter |
DE102007053124B3 (de) * | 2007-11-08 | 2009-01-29 | Carl Mahr Holding Gmbh | Kompaktes Linnik-Interferometer |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1303574B (de) * | 1962-06-06 | 1972-04-27 | Manufacture De Vilebrequins De Lorette | Längenmeß vorrichtung |
US3560097A (en) * | 1967-05-03 | 1971-02-02 | Anatoly Alexandrovich Gavrilki | Photoelectric microscope |
US3604810A (en) * | 1968-06-14 | 1971-09-14 | Jenoptik Jena Gmbh Veb | Apparatus for the objective localization of an object relative to a scale carrier |
-
1970
- 1970-06-29 CH CH976570A patent/CH526090A/fr not_active IP Right Cessation
-
1971
- 1971-06-07 US US00150641A patent/US3724959A/en not_active Expired - Lifetime
- 1971-06-07 GB GB1916671*[A patent/GB1301626A/en not_active Expired
- 1971-06-18 FR FR717122322A patent/FR2096551B1/fr not_active Expired
- 1971-06-29 DE DE19712132286 patent/DE2132286A1/de active Pending
Also Published As
Publication number | Publication date |
---|---|
US3724959A (en) | 1973-04-03 |
FR2096551A1 (fr) | 1972-02-18 |
CH526090A (fr) | 1972-07-31 |
GB1301626A (fr) | 1973-01-04 |
DE2132286A1 (de) | 1972-01-13 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |