FR2095258A1 - - Google Patents
Info
- Publication number
- FR2095258A1 FR2095258A1 FR7121453A FR7121453A FR2095258A1 FR 2095258 A1 FR2095258 A1 FR 2095258A1 FR 7121453 A FR7121453 A FR 7121453A FR 7121453 A FR7121453 A FR 7121453A FR 2095258 A1 FR2095258 A1 FR 2095258A1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76202—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76264—SOI together with lateral isolation, e.g. using local oxidation of silicon, or dielectric or polycristalline material refilled trench or air gap isolation regions, e.g. completely isolated semiconductor islands
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76264—SOI together with lateral isolation, e.g. using local oxidation of silicon, or dielectric or polycristalline material refilled trench or air gap isolation regions, e.g. completely isolated semiconductor islands
- H01L21/76283—Lateral isolation by refilling of trenches with dielectric material
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Element Separation (AREA)
- Bipolar Transistors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5100070 | 1970-06-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2095258A1 true FR2095258A1 (ru) | 1972-02-11 |
FR2095258B1 FR2095258B1 (ru) | 1977-04-22 |
Family
ID=12874501
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7121453A Expired FR2095258B1 (ru) | 1970-06-15 | 1971-06-14 |
Country Status (4)
Country | Link |
---|---|
DE (1) | DE2129676A1 (ru) |
FR (1) | FR2095258B1 (ru) |
GB (2) | GB1362512A (ru) |
NL (1) | NL7108101A (ru) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19643143C2 (de) * | 1996-10-18 | 2002-06-20 | Inventa Ag | Haftvermittler für Polyamid-Verbunde, Verfahren zu deren Herstellung sowie deren Verwendung |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1086607A (en) * | 1965-06-03 | 1967-10-11 | Ncr Co | Method of electrically isolating components in solid-state electronic circuits |
FR1549386A (ru) * | 1966-10-05 | 1968-12-13 |
-
1971
- 1971-06-07 GB GB785274A patent/GB1362512A/en not_active Expired
- 1971-06-07 GB GB1918471A patent/GB1360996A/en not_active Expired
- 1971-06-14 NL NL7108101A patent/NL7108101A/xx unknown
- 1971-06-14 FR FR7121453A patent/FR2095258B1/fr not_active Expired
- 1971-06-15 DE DE19712129676 patent/DE2129676A1/de active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1086607A (en) * | 1965-06-03 | 1967-10-11 | Ncr Co | Method of electrically isolating components in solid-state electronic circuits |
FR1549386A (ru) * | 1966-10-05 | 1968-12-13 |
Also Published As
Publication number | Publication date |
---|---|
NL7108101A (ru) | 1971-12-17 |
FR2095258B1 (ru) | 1977-04-22 |
DE2129676A1 (de) | 1972-02-10 |
GB1360996A (en) | 1974-07-24 |
GB1362512A (en) | 1974-08-07 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |