FR2092728B3 - - Google Patents
Info
- Publication number
- FR2092728B3 FR2092728B3 FR7021676A FR7021676A FR2092728B3 FR 2092728 B3 FR2092728 B3 FR 2092728B3 FR 7021676 A FR7021676 A FR 7021676A FR 7021676 A FR7021676 A FR 7021676A FR 2092728 B3 FR2092728 B3 FR 2092728B3
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
- H01L21/2251—Diffusion into or out of group IV semiconductors
- H01L21/2252—Diffusion into or out of group IV semiconductors using predeposition of impurities into the semiconductor surface, e.g. from a gaseous phase
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Silicon Compounds (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7021676A FR2092728A7 (en) | 1970-06-12 | 1970-06-12 | N-doped silicon - by phosphorus diffusion from phosphine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7021676A FR2092728A7 (en) | 1970-06-12 | 1970-06-12 | N-doped silicon - by phosphorus diffusion from phosphine |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2092728A7 FR2092728A7 (en) | 1972-01-28 |
FR2092728B3 true FR2092728B3 (ja) | 1973-03-16 |
Family
ID=9057100
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7021676A Expired FR2092728A7 (en) | 1970-06-12 | 1970-06-12 | N-doped silicon - by phosphorus diffusion from phosphine |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2092728A7 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2838928A1 (de) * | 1978-09-07 | 1980-03-20 | Ibm Deutschland | Verfahren zum dotieren von siliciumkoerpern mit bor |
-
1970
- 1970-06-12 FR FR7021676A patent/FR2092728A7/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2092728A7 (en) | 1972-01-28 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |