FR2083429A7 - - Google Patents

Info

Publication number
FR2083429A7
FR2083429A7 FR7109808A FR7109808A FR2083429A7 FR 2083429 A7 FR2083429 A7 FR 2083429A7 FR 7109808 A FR7109808 A FR 7109808A FR 7109808 A FR7109808 A FR 7109808A FR 2083429 A7 FR2083429 A7 FR 2083429A7
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7109808A
Other languages
French (fr)
Other versions
FR2083429B3 (cg-RX-API-DMAC10.html
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Application granted granted Critical
Publication of FR2083429A7 publication Critical patent/FR2083429A7/fr
Publication of FR2083429B3 publication Critical patent/FR2083429B3/fr
Expired legal-status Critical Current

Links

Classifications

    • H10W74/47
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00Subject matter not provided for in other groups of this subclass
    • H10P95/00
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/043Dual dielectric
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/049Equivalence and options
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/118Oxide films
FR7109808A 1970-03-19 1971-03-19 Expired FR2083429B3 (cg-RX-API-DMAC10.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US2116170A 1970-03-19 1970-03-19

Publications (2)

Publication Number Publication Date
FR2083429A7 true FR2083429A7 (cg-RX-API-DMAC10.html) 1971-12-17
FR2083429B3 FR2083429B3 (cg-RX-API-DMAC10.html) 1973-12-28

Family

ID=21802693

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7109808A Expired FR2083429B3 (cg-RX-API-DMAC10.html) 1970-03-19 1971-03-19

Country Status (3)

Country Link
US (1) US3670403A (cg-RX-API-DMAC10.html)
DE (1) DE2111633A1 (cg-RX-API-DMAC10.html)
FR (1) FR2083429B3 (cg-RX-API-DMAC10.html)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3919008A (en) * 1970-12-02 1975-11-11 Hitachi Ltd Method of manufacturing MOS type semiconductor devices
US3793090A (en) * 1972-11-21 1974-02-19 Ibm Method for stabilizing fet devices having silicon gates and composite nitride-oxide gate dielectrics
US3853496A (en) * 1973-01-02 1974-12-10 Gen Electric Method of making a metal insulator silicon field effect transistor (mis-fet) memory device and the product
US3909320A (en) * 1973-12-26 1975-09-30 Signetics Corp Method for forming MOS structure using double diffusion
US3969165A (en) * 1975-06-02 1976-07-13 Trw Inc. Simplified method of transistor manufacture
US4256514A (en) * 1978-11-03 1981-03-17 International Business Machines Corporation Method for forming a narrow dimensioned region on a body
US5874766A (en) * 1988-12-20 1999-02-23 Matsushita Electric Industrial Co., Ltd. Semiconductor device having an oxynitride film
KR940009352B1 (ko) * 1990-07-09 1994-10-07 가부시끼가이샤 도시바 반도체 소자
US6004875A (en) 1995-11-15 1999-12-21 Micron Technology, Inc. Etch stop for use in etching of silicon oxide
US5830789A (en) * 1996-11-19 1998-11-03 Integrated Device Technology, Inc. CMOS process forming wells after gate formation
US20030021327A1 (en) * 2001-07-25 2003-01-30 Murry Stefan J. Semiconductor surface-emitting laser with integrated photodetector
CN115458399B (zh) * 2022-09-13 2025-01-03 中晟鲲鹏光电半导体有限公司 一种碳化硅晶圆的裂片方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3475234A (en) * 1967-03-27 1969-10-28 Bell Telephone Labor Inc Method for making mis structures
US3566518A (en) * 1967-10-13 1971-03-02 Gen Electric Method for fabricating field-effect transistor devices and integrated circuit modules containing the same by selective diffusion of activator impurities through preselected portions of passivating-insulating films
US3541676A (en) * 1967-12-18 1970-11-24 Gen Electric Method of forming field-effect transistors utilizing doped insulators as activator source

Also Published As

Publication number Publication date
DE2111633A1 (de) 1971-09-30
FR2083429B3 (cg-RX-API-DMAC10.html) 1973-12-28
US3670403A (en) 1972-06-20

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Legal Events

Date Code Title Description
ST Notification of lapse