FR2080457A5 - - Google Patents

Info

Publication number
FR2080457A5
FR2080457A5 FR7102576A FR7102576A FR2080457A5 FR 2080457 A5 FR2080457 A5 FR 2080457A5 FR 7102576 A FR7102576 A FR 7102576A FR 7102576 A FR7102576 A FR 7102576A FR 2080457 A5 FR2080457 A5 FR 2080457A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7102576A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of FR2080457A5 publication Critical patent/FR2080457A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/60—Substrates
    • H10P95/00—

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
FR7102576A 1970-02-17 1971-01-21 Expired FR2080457A5 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US1215070A 1970-02-17 1970-02-17

Publications (1)

Publication Number Publication Date
FR2080457A5 true FR2080457A5 (enExample) 1971-11-12

Family

ID=21753621

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7102576A Expired FR2080457A5 (enExample) 1970-02-17 1971-01-21

Country Status (6)

Country Link
US (1) US3729316A (enExample)
JP (1) JPS5139510B1 (enExample)
CA (1) CA947563A (enExample)
DE (1) DE2052809C3 (enExample)
FR (1) FR2080457A5 (enExample)
GB (1) GB1323647A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0286018A3 (de) * 1987-04-09 1989-07-05 BASF Aktiengesellschaft Vorlagenmaterial für die Belichtung von lichtempfindlich beschichteten Materialien

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3863331A (en) * 1972-09-11 1975-02-04 Rca Corp Matching of semiconductor device characteristics
US4063812A (en) * 1976-08-12 1977-12-20 International Business Machines Corporation Projection printing system with an improved mask configuration
US4536240A (en) * 1981-12-02 1985-08-20 Advanced Semiconductor Products, Inc. Method of forming thin optical membranes
US5089361A (en) * 1990-08-17 1992-02-18 Industrial Technology Research Institute Mask making process

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0286018A3 (de) * 1987-04-09 1989-07-05 BASF Aktiengesellschaft Vorlagenmaterial für die Belichtung von lichtempfindlich beschichteten Materialien

Also Published As

Publication number Publication date
JPS5139510B1 (enExample) 1976-10-28
DE2052809A1 (de) 1971-08-26
GB1323647A (en) 1973-07-18
DE2052809C3 (de) 1980-01-31
US3729316A (en) 1973-04-24
DE2052809B2 (de) 1979-05-10
CA947563A (en) 1974-05-21

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Legal Events

Date Code Title Description
ST Notification of lapse