FR2078948A5 - - Google Patents

Info

Publication number
FR2078948A5
FR2078948A5 FR7106073A FR7106073A FR2078948A5 FR 2078948 A5 FR2078948 A5 FR 2078948A5 FR 7106073 A FR7106073 A FR 7106073A FR 7106073 A FR7106073 A FR 7106073A FR 2078948 A5 FR2078948 A5 FR 2078948A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7106073A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of FR2078948A5 publication Critical patent/FR2078948A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
FR7106073A 1970-02-27 1971-02-23 Expired FR2078948A5 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB964270 1970-02-27

Publications (1)

Publication Number Publication Date
FR2078948A5 true FR2078948A5 (en) 1971-11-05

Family

ID=9875949

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7106073A Expired FR2078948A5 (en) 1970-02-27 1971-02-23

Country Status (3)

Country Link
DE (1) DE2108669C3 (en)
FR (1) FR2078948A5 (en)
GB (1) GB1308077A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2314580A1 (en) * 1975-06-13 1977-01-07 Ibm MICROCIRCUIT CONFIGURATIONS WRITING PROCESS TO ELECTRONIC BEAM
EP0035445A2 (en) * 1980-03-04 1981-09-09 C.G.R. MeV Charged particle accelerator utilizing waves in the range of one meter

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5423476A (en) * 1977-07-25 1979-02-22 Akashi Seisakusho Kk Composite electron lens

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2314580A1 (en) * 1975-06-13 1977-01-07 Ibm MICROCIRCUIT CONFIGURATIONS WRITING PROCESS TO ELECTRONIC BEAM
EP0035445A2 (en) * 1980-03-04 1981-09-09 C.G.R. MeV Charged particle accelerator utilizing waves in the range of one meter
FR2477827A1 (en) * 1980-03-04 1981-09-11 Cgr Mev ACCELERATOR DEVICE OF CHARGED PARTICLES OPERATING IN METRIC WAVES
EP0035445B1 (en) * 1980-03-04 1984-05-16 C.G.R. MeV Charged particle accelerator utilizing waves in the range of one meter

Also Published As

Publication number Publication date
DE2108669A1 (en) 1971-09-09
DE2108669C3 (en) 1979-03-01
GB1308077A (en) 1973-02-21
DE2108669B2 (en) 1978-06-22

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Legal Events

Date Code Title Description
ST Notification of lapse