FR2072196A5 - - Google Patents

Info

Publication number
FR2072196A5
FR2072196A5 FR7041258A FR7041258A FR2072196A5 FR 2072196 A5 FR2072196 A5 FR 2072196A5 FR 7041258 A FR7041258 A FR 7041258A FR 7041258 A FR7041258 A FR 7041258A FR 2072196 A5 FR2072196 A5 FR 2072196A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7041258A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of FR2072196A5 publication Critical patent/FR2072196A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
FR7041258A 1969-12-22 1970-11-09 Expired FR2072196A5 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US88722969A 1969-12-22 1969-12-22

Publications (1)

Publication Number Publication Date
FR2072196A5 true FR2072196A5 (fr) 1971-09-24

Family

ID=25390721

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7041258A Expired FR2072196A5 (fr) 1969-12-22 1970-11-09

Country Status (5)

Country Link
US (1) US3731191A (fr)
JP (1) JPS4825818B1 (fr)
DE (1) DE2063198A1 (fr)
FR (1) FR2072196A5 (fr)
GB (1) GB1309160A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0265767A1 (fr) * 1986-10-14 1988-05-04 Feinmetall Gesellschaft mit beschrÀ¤nkter Haftung Carte à aiguilles
FR2615955A1 (fr) * 1987-05-29 1988-12-02 Teradyne Inc Sonde pour tester des composants electroniques

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3911361A (en) * 1974-06-28 1975-10-07 Ibm Coaxial array space transformer
US4001685A (en) * 1974-03-04 1977-01-04 Electroglas, Inc. Micro-circuit test probe
US4038599A (en) * 1974-12-30 1977-07-26 International Business Machines Corporation High density wafer contacting and test system
US4035722A (en) * 1975-03-17 1977-07-12 Anatoly Leonidovich Ryabov Multiprobe head for checking electrical parameters of semiconductor instruments and microcircuits
US4035723A (en) * 1975-10-16 1977-07-12 Xynetics, Inc. Probe arm
DE2839982C2 (de) * 1978-09-14 1984-01-05 Feinmetall Gmbh, 7033 Herrenberg Federnder Kontaktbaustein
DE2933862A1 (de) * 1979-08-21 1981-03-12 Paul Mang Vorrichtung zur elektronischen pruefung von leiterplatten.
US4554506A (en) * 1981-06-30 1985-11-19 International Business Machines Corporation Modular test probe
US4566184A (en) * 1981-08-24 1986-01-28 Rockwell International Corporation Process for making a probe for high speed integrated circuits
US4510445A (en) * 1981-11-02 1985-04-09 Joseph Kvaternik Miniature circuit processing devices and matrix test heads for use therein
DE3337915A1 (de) * 1982-10-21 1984-05-24 Feinmetall Gmbh, 7033 Herrenberg Kontaktiervorrichtung
GB2146849B (en) * 1983-09-17 1987-08-05 Marconi Instruments Ltd Electrical test probe head assembly
US4609243A (en) * 1983-11-03 1986-09-02 Augat Inc. Adaptor for automatic testing equipment
US4535536A (en) * 1983-11-03 1985-08-20 Augat Inc. Method of assembling adaptor for automatic testing equipment
DE3343274A1 (de) * 1983-11-30 1985-06-05 Feinmetall Gmbh, 7033 Herrenberg Kontaktiervorrichtung
US4837507A (en) * 1984-06-08 1989-06-06 American Telephone And Telegraph Company At&T Technologies, Inc. High frequency in-circuit test fixture
US4764722A (en) * 1985-10-28 1988-08-16 International Business Machines Corporation Coaxial probe
US4878018A (en) * 1986-02-28 1989-10-31 Malloy James T Electrical testing device
US4893074A (en) * 1988-05-13 1990-01-09 Intest Corporation Electronic device testing system
US5066907A (en) * 1990-02-06 1991-11-19 Cerprobe Corporation Probe system for device and circuit testing
JP2769015B2 (ja) * 1990-03-08 1998-06-25 株式会社神戸製鋼所 電子回路基板検査用プローバーピンヘッド及びその製造方法
US5663654A (en) * 1990-08-29 1997-09-02 Micron Technology, Inc. Universal wafer carrier for wafer level die burn-in
US7511520B2 (en) * 1990-08-29 2009-03-31 Micron Technology, Inc. Universal wafer carrier for wafer level die burn-in
US5436570A (en) * 1991-05-21 1995-07-25 Tan; Yin L. Burn-in test probe for fine-pitch packages with side contacts
US5486770A (en) * 1994-06-27 1996-01-23 Motorola, Inc. High frequency wafer probe apparatus and method
US6059982A (en) * 1997-09-30 2000-05-09 International Business Machines Corporation Micro probe assembly and method of fabrication
US6014032A (en) 1997-09-30 2000-01-11 International Business Machines Corporation Micro probe ring assembly and method of fabrication
DE19811795C1 (de) * 1998-03-18 1999-09-02 Atg Test Systems Gmbh Nadel für einen Prüfadapter
US6064195A (en) * 1998-05-11 2000-05-16 R-Tec Corporation Test probe positioning device
US6194904B1 (en) 1998-05-19 2001-02-27 R-Tec Corporation Socket test probe and method of making
US6259260B1 (en) * 1998-07-30 2001-07-10 Intest Ip Corporation Apparatus for coupling a test head and probe card in a wafer testing system
US6842029B2 (en) 2002-04-11 2005-01-11 Solid State Measurements, Inc. Non-invasive electrical measurement of semiconductor wafers
US8134377B1 (en) 2005-08-31 2012-03-13 Lecroy Corporation Adherable holder and locater tool
TWI490499B (zh) * 2014-01-08 2015-07-01 Hon Hai Prec Ind Co Ltd 探棒固定裝置
US10426030B2 (en) * 2017-04-21 2019-09-24 International Business Machines Corporation Trace/via hybrid structure multichip carrier
TWI627411B (zh) * 2017-12-15 2018-06-21 致茂電子股份有限公司 電流探針結構
CN111060723B (zh) * 2018-10-16 2022-04-29 名硕电脑(苏州)有限公司 探棒固定组件
BE1028241B1 (nl) * 2020-04-27 2021-11-29 Ipte Factory Automation N V Inrichting voor het testen van een printplaat

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2954521A (en) * 1958-04-23 1960-09-27 Technical Electronics Corp Air-actuated electrical contact probe

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0265767A1 (fr) * 1986-10-14 1988-05-04 Feinmetall Gesellschaft mit beschrÀ¤nkter Haftung Carte à aiguilles
FR2615955A1 (fr) * 1987-05-29 1988-12-02 Teradyne Inc Sonde pour tester des composants electroniques

Also Published As

Publication number Publication date
JPS4825818B1 (fr) 1973-08-01
DE2063198A1 (de) 1971-06-24
GB1309160A (en) 1973-03-07
US3731191A (en) 1973-05-01

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Legal Events

Date Code Title Description
ST Notification of lapse