FR2072083B1 - - Google Patents

Info

Publication number
FR2072083B1
FR2072083B1 FR7041264A FR7041264A FR2072083B1 FR 2072083 B1 FR2072083 B1 FR 2072083B1 FR 7041264 A FR7041264 A FR 7041264A FR 7041264 A FR7041264 A FR 7041264A FR 2072083 B1 FR2072083 B1 FR 2072083B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7041264A
Other versions
FR2072083A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2072083A1 publication Critical patent/FR2072083A1/fr
Application granted granted Critical
Publication of FR2072083B1 publication Critical patent/FR2072083B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/24—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using chemical vapour deposition [CVD]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/29—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by the substrates
    • H10P14/2901—Materials
    • H10P14/2902—Materials being Group IVA materials
    • H10P14/2905—Silicon, silicon germanium or germanium
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/29—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by the substrates
    • H10P14/2926—Crystal orientations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34—Deposited materials, e.g. layers
    • H10P14/3402—Deposited materials, e.g. layers characterised by the chemical composition
    • H10P14/3404—Deposited materials, e.g. layers characterised by the chemical composition being Group IVA materials
    • H10P14/3411—Silicon, silicon germanium or germanium
FR7041264A 1969-12-29 1970-11-09 Expired FR2072083B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US88852169A 1969-12-29 1969-12-29

Publications (2)

Publication Number Publication Date
FR2072083A1 FR2072083A1 (fr) 1971-09-24
FR2072083B1 true FR2072083B1 (fr) 1975-01-10

Family

ID=25393325

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7041264A Expired FR2072083B1 (fr) 1969-12-29 1970-11-09

Country Status (4)

Country Link
JP (1) JPS494581B1 (fr)
DE (1) DE2061134A1 (fr)
FR (1) FR2072083B1 (fr)
GB (1) GB1332464A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0020135A1 (fr) * 1979-05-29 1980-12-10 Massachusetts Institute Of Technology Intégration à trois dimensions par épitaxie graphique

Also Published As

Publication number Publication date
DE2061134A1 (de) 1971-07-15
GB1332464A (en) 1973-10-03
JPS494581B1 (fr) 1974-02-01
FR2072083A1 (fr) 1971-09-24

Similar Documents

Publication Publication Date Title
AU465452B2 (fr)
AU450150B2 (fr)
AU442375B2 (fr)
FR2072083B1 (fr)
AU5113869A (fr)
AU442535B2 (fr)
AU442538B2 (fr)
AU414607B2 (fr)
AU442463B2 (fr)
AU410358B2 (fr)
AU442380B2 (fr)
AU470661B1 (fr)
AU442357B2 (fr)
AU4923469A (fr)
CS154297B2 (fr)
CS153782B1 (fr)
CS148794B1 (fr)
AU5598769A (fr)
AU4949169A (fr)
AU5397469A (fr)
AU5228269A (fr)
AU5077469A (fr)
BE753103A (fr)
AU469091A (fr)
AU5066368A (fr)

Legal Events

Date Code Title Description
ST Notification of lapse