FR2071512A5 - - Google Patents

Info

Publication number
FR2071512A5
FR2071512A5 FR6945676A FR6945676A FR2071512A5 FR 2071512 A5 FR2071512 A5 FR 2071512A5 FR 6945676 A FR6945676 A FR 6945676A FR 6945676 A FR6945676 A FR 6945676A FR 2071512 A5 FR2071512 A5 FR 2071512A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR6945676A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Radiotechnique Compelec RTC SA
Original Assignee
Radiotechnique Compelec RTC SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Radiotechnique Compelec RTC SA filed Critical Radiotechnique Compelec RTC SA
Priority to FR6945676A priority Critical patent/FR2071512A5/fr
Priority to DE2062664A priority patent/DE2062664B2/de
Priority to JP45119537A priority patent/JPS5039075B1/ja
Priority to GB6154270A priority patent/GB1330013A/en
Application granted granted Critical
Publication of FR2071512A5 publication Critical patent/FR2071512A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/02168—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Sustainable Development (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electromagnetism (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Sustainable Energy (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Materials Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Photovoltaic Devices (AREA)
FR6945676A 1969-12-31 1969-12-31 Expired FR2071512A5 (xx)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR6945676A FR2071512A5 (xx) 1969-12-31 1969-12-31
DE2062664A DE2062664B2 (de) 1969-12-31 1970-12-19 Verfahren zum Anbringen dünner Schichten durch Kathodenzerstäubung
JP45119537A JPS5039075B1 (xx) 1969-12-31 1970-12-28
GB6154270A GB1330013A (en) 1969-12-31 1970-12-29 Deposition of titanium oxides

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR6945676A FR2071512A5 (xx) 1969-12-31 1969-12-31

Publications (1)

Publication Number Publication Date
FR2071512A5 true FR2071512A5 (xx) 1971-09-17

Family

ID=9045482

Family Applications (1)

Application Number Title Priority Date Filing Date
FR6945676A Expired FR2071512A5 (xx) 1969-12-31 1969-12-31

Country Status (4)

Country Link
JP (1) JPS5039075B1 (xx)
DE (1) DE2062664B2 (xx)
FR (1) FR2071512A5 (xx)
GB (1) GB1330013A (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2422729A1 (fr) * 1978-04-13 1979-11-09 Litton Systems Inc Procede de realisation de revetements optiques multicouches

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2527184C3 (de) * 1975-06-18 1981-07-02 Philips Patentverwaltung Gmbh, 2000 Hamburg Vorrichtung zur Herstellung von Targets für Kathodenzerstäubung
JPS5654791A (en) * 1979-10-09 1981-05-14 Fuji Photo Optical Co Ltd Light source driving circuit
JPS5793416A (en) * 1980-11-28 1982-06-10 Shimadzu Corp Regulated power supply circuit for light source
JPS5850312B2 (ja) * 1981-02-18 1983-11-09 株式会社日立製作所 スパツタリング装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2422729A1 (fr) * 1978-04-13 1979-11-09 Litton Systems Inc Procede de realisation de revetements optiques multicouches

Also Published As

Publication number Publication date
JPS5039075B1 (xx) 1975-12-13
DE2062664B2 (de) 1980-10-02
DE2062664A1 (de) 1971-07-08
GB1330013A (en) 1973-09-12

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Legal Events

Date Code Title Description
ST Notification of lapse