FR2068673B1 - - Google Patents

Info

Publication number
FR2068673B1
FR2068673B1 FR7042583A FR7042583A FR2068673B1 FR 2068673 B1 FR2068673 B1 FR 2068673B1 FR 7042583 A FR7042583 A FR 7042583A FR 7042583 A FR7042583 A FR 7042583A FR 2068673 B1 FR2068673 B1 FR 2068673B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7042583A
Other versions
FR2068673A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP9429169A external-priority patent/JPS4836599B1/ja
Priority claimed from JP9429269A external-priority patent/JPS556291B1/ja
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of FR2068673A1 publication Critical patent/FR2068673A1/fr
Application granted granted Critical
Publication of FR2068673B1 publication Critical patent/FR2068673B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Formation Of Insulating Films (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
FR7042583A 1969-11-26 1970-11-26 Semiconductor devices with low temp insulators of reduced porosity Granted FR2068673A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9429169A JPS4836599B1 (fr) 1969-11-26 1969-11-26
JP9429269A JPS556291B1 (fr) 1969-11-26 1969-11-26

Publications (2)

Publication Number Publication Date
FR2068673A1 FR2068673A1 (en) 1971-08-27
FR2068673B1 true FR2068673B1 (fr) 1974-09-06

Family

ID=26435554

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7042583A Granted FR2068673A1 (en) 1969-11-26 1970-11-26 Semiconductor devices with low temp insulators of reduced porosity

Country Status (3)

Country Link
DE (1) DE2058059A1 (fr)
FR (1) FR2068673A1 (fr)
NL (1) NL7017242A (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04120732A (ja) * 1990-09-12 1992-04-21 Hitachi Ltd 固体素子及びその製造方法
EP0572704B1 (fr) * 1992-06-05 2000-04-19 Semiconductor Process Laboratory Co., Ltd. Procédé de fabrication d'un dispositif semi-conducteur comportant une méthode de réforme d'une couche isolante obtenue par CVD à basse température
JPH0817174B2 (ja) * 1993-11-10 1996-02-21 キヤノン販売株式会社 絶縁膜の改質方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3461361A (en) * 1966-02-24 1969-08-12 Rca Corp Complementary mos transistor integrated circuits with inversion layer formed by ionic discharge bombardment

Also Published As

Publication number Publication date
FR2068673A1 (en) 1971-08-27
NL7017242A (fr) 1971-05-28
DE2058059A1 (de) 1971-06-09

Similar Documents

Publication Publication Date Title
AU2270770A (fr)
AU465452B2 (fr)
AU429630B2 (fr)
AU450150B2 (fr)
AU2355770A (fr)
AU442375B2 (fr)
AU470301B1 (fr)
AU427401B2 (fr)
AU442463B2 (fr)
AU417208B2 (fr)
AU428131B2 (fr)
AU470661B1 (fr)
AT308690B (fr)
AU410358B2 (fr)
AU438128B2 (fr)
AU414607B2 (fr)
AU442285B2 (fr)
AU442322B2 (fr)
AU442357B2 (fr)
AU428074B2 (fr)
AU442380B2 (fr)
AU425297B2 (fr)
AU442535B2 (fr)
AU442538B2 (fr)
AU442554B2 (fr)

Legal Events

Date Code Title Description
ST Notification of lapse