FR2067256A1 - - Google Patents

Info

Publication number
FR2067256A1
FR2067256A1 FR7040802A FR7040802A FR2067256A1 FR 2067256 A1 FR2067256 A1 FR 2067256A1 FR 7040802 A FR7040802 A FR 7040802A FR 7040802 A FR7040802 A FR 7040802A FR 2067256 A1 FR2067256 A1 FR 2067256A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7040802A
Other languages
French (fr)
Other versions
FR2067256B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of FR2067256A1 publication Critical patent/FR2067256A1/fr
Application granted granted Critical
Publication of FR2067256B1 publication Critical patent/FR2067256B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
FR7040802A 1969-11-12 1970-11-13 Expired FR2067256B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US87565769A 1969-11-12 1969-11-12

Publications (2)

Publication Number Publication Date
FR2067256A1 true FR2067256A1 (en) 1971-08-20
FR2067256B1 FR2067256B1 (en) 1973-02-02

Family

ID=25366150

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7040802A Expired FR2067256B1 (en) 1969-11-12 1970-11-13

Country Status (5)

Country Link
JP (1) JPS4912838B1 (en)
CH (1) CH532963A (en)
DE (1) DE2054161A1 (en)
FR (1) FR2067256B1 (en)
GB (1) GB1326570A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH664303A5 (en) * 1985-04-03 1988-02-29 Balzers Hochvakuum HOLDING DEVICE FOR TARGETS FOR CATHODE SPRAYING.

Also Published As

Publication number Publication date
JPS4912838B1 (en) 1974-03-27
DE2054161A1 (en) 1971-05-19
FR2067256B1 (en) 1973-02-02
GB1326570A (en) 1973-08-15
CH532963A (en) 1973-01-31

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Legal Events

Date Code Title Description
ST Notification of lapse