FR2052397A5 - - Google Patents

Info

Publication number
FR2052397A5
FR2052397A5 FR7017724A FR7017724A FR2052397A5 FR 2052397 A5 FR2052397 A5 FR 2052397A5 FR 7017724 A FR7017724 A FR 7017724A FR 7017724 A FR7017724 A FR 7017724A FR 2052397 A5 FR2052397 A5 FR 2052397A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7017724A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of FR2052397A5 publication Critical patent/FR2052397A5/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • C30B23/06—Heating of the deposition chamber, the substrate or the materials to be evaporated
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/80—Material per se process of making same
    • Y10S505/815—Process of making per se
    • Y10S505/816—Sputtering, including coating, forming, or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR7017724A 1969-06-30 1970-05-15 Expired FR2052397A5 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US83773869A 1969-06-30 1969-06-30

Publications (1)

Publication Number Publication Date
FR2052397A5 true FR2052397A5 (en) 1971-04-09

Family

ID=25275276

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7017724A Expired FR2052397A5 (en) 1969-06-30 1970-05-15

Country Status (5)

Country Link
US (1) US3726776A (en)
JP (1) JPS4911145B1 (en)
DE (1) DE2021868B2 (en)
FR (1) FR2052397A5 (en)
GB (1) GB1316867A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7902247A (en) * 1978-03-25 1979-09-27 Fujitsu Ltd METAL INSULATOR SEMICONDUCTOR TYPE SEMICONDUCTOR DEVICE AND PROCEDURE FOR MANUFACTURING IT.
US5985115A (en) * 1997-04-11 1999-11-16 Novellus Systems, Inc. Internally cooled target assembly for magnetron sputtering
TWI381058B (en) * 2007-07-03 2013-01-01 Univ Nat Chunghsing A method for preparing a metal nitride film

Also Published As

Publication number Publication date
GB1316867A (en) 1973-05-16
DE2021868A1 (en) 1971-01-14
DE2021868B2 (en) 1979-12-13
US3726776A (en) 1973-04-10
JPS4911145B1 (en) 1974-03-15

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Legal Events

Date Code Title Description
ST Notification of lapse