FR2046833A1 - - Google Patents

Info

Publication number
FR2046833A1
FR2046833A1 FR7022389A FR7022389A FR2046833A1 FR 2046833 A1 FR2046833 A1 FR 2046833A1 FR 7022389 A FR7022389 A FR 7022389A FR 7022389 A FR7022389 A FR 7022389A FR 2046833 A1 FR2046833 A1 FR 2046833A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7022389A
Other languages
French (fr)
Other versions
FR2046833B1 (enExample
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Associated Electrical Industries Ltd
Original Assignee
Associated Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Associated Electrical Industries Ltd filed Critical Associated Electrical Industries Ltd
Publication of FR2046833A1 publication Critical patent/FR2046833A1/fr
Application granted granted Critical
Publication of FR2046833B1 publication Critical patent/FR2046833B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
FR7022389A 1969-06-17 1970-06-17 Expired FR2046833B1 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3066169 1969-06-17

Publications (2)

Publication Number Publication Date
FR2046833A1 true FR2046833A1 (enExample) 1971-03-12
FR2046833B1 FR2046833B1 (enExample) 1973-01-12

Family

ID=10311132

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7022389A Expired FR2046833B1 (enExample) 1969-06-17 1970-06-17

Country Status (1)

Country Link
FR (1) FR2046833B1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2499314A1 (fr) * 1981-02-04 1982-08-06 Centre Nat Rech Scient Ensemble de microscope electronique a balayage a fonctionnement in situ
EP0066243A3 (en) * 1981-05-26 1983-04-27 Tokyo Shibaura Denki Kabushiki Kaisha Electron-beam image transfer device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2499314A1 (fr) * 1981-02-04 1982-08-06 Centre Nat Rech Scient Ensemble de microscope electronique a balayage a fonctionnement in situ
WO1982002796A1 (fr) * 1981-02-04 1982-08-19 Jouffrey Bernard Ensemble de microscope electronique a balayage a fonctionnement in situ
EP0057646A3 (en) * 1981-02-04 1982-08-25 Centre Nat Rech Scient Scanning electron microscope for use in situ
US4516026A (en) * 1981-02-04 1985-05-07 Centre National De La Recherche Scientifique Cnrs Scanning electron microscope assembly operating in situ
EP0066243A3 (en) * 1981-05-26 1983-04-27 Tokyo Shibaura Denki Kabushiki Kaisha Electron-beam image transfer device

Also Published As

Publication number Publication date
FR2046833B1 (enExample) 1973-01-12

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Legal Events

Date Code Title Description
ST Notification of lapse