FR2046833B1 - - Google Patents
Info
- Publication number
- FR2046833B1 FR2046833B1 FR7022389A FR7022389A FR2046833B1 FR 2046833 B1 FR2046833 B1 FR 2046833B1 FR 7022389 A FR7022389 A FR 7022389A FR 7022389 A FR7022389 A FR 7022389A FR 2046833 B1 FR2046833 B1 FR 2046833B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB3066169 | 1969-06-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2046833A1 FR2046833A1 (fr) | 1971-03-12 |
FR2046833B1 true FR2046833B1 (fr) | 1973-01-12 |
Family
ID=10311132
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7022389A Expired FR2046833B1 (fr) | 1969-06-17 | 1970-06-17 |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2046833B1 (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2499314A1 (fr) * | 1981-02-04 | 1982-08-06 | Centre Nat Rech Scient | Ensemble de microscope electronique a balayage a fonctionnement in situ |
JPS57194531A (en) * | 1981-05-26 | 1982-11-30 | Toshiba Corp | Electron beam transfer device |
-
1970
- 1970-06-17 FR FR7022389A patent/FR2046833B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2046833A1 (fr) | 1971-03-12 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |