FR2044576A5 - - Google Patents

Info

Publication number
FR2044576A5
FR2044576A5 FR6917215A FR6917215A FR2044576A5 FR 2044576 A5 FR2044576 A5 FR 2044576A5 FR 6917215 A FR6917215 A FR 6917215A FR 6917215 A FR6917215 A FR 6917215A FR 2044576 A5 FR2044576 A5 FR 2044576A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR6917215A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BARBIER BENARD TURENNE
Original Assignee
BARBIER BENARD TURENNE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BARBIER BENARD TURENNE filed Critical BARBIER BENARD TURENNE
Priority to FR6917215A priority Critical patent/FR2044576A5/fr
Priority to DE19702026069 priority patent/DE2026069A1/de
Priority to GB2551870A priority patent/GB1317823A/en
Application granted granted Critical
Publication of FR2044576A5 publication Critical patent/FR2044576A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B15/00—Special procedures for taking photographs; Apparatus therefor
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • G05D3/14—Control of position or direction using feedback using an analogue comparing device
    • G05D3/1436—Control of position or direction using feedback using an analogue comparing device with fine or coarse devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
FR6917215A 1969-05-27 1969-05-27 Expired FR2044576A5 (enExample)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR6917215A FR2044576A5 (enExample) 1969-05-27 1969-05-27
DE19702026069 DE2026069A1 (de) 1969-05-27 1970-05-27 Verfahren und Vorrichtung zur optischen Präzisions-Positionierung·
GB2551870A GB1317823A (en) 1969-05-27 1970-05-27 Photo-electric positioning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR6917215A FR2044576A5 (enExample) 1969-05-27 1969-05-27

Publications (1)

Publication Number Publication Date
FR2044576A5 true FR2044576A5 (enExample) 1971-02-19

Family

ID=9034640

Family Applications (1)

Application Number Title Priority Date Filing Date
FR6917215A Expired FR2044576A5 (enExample) 1969-05-27 1969-05-27

Country Status (3)

Country Link
DE (1) DE2026069A1 (enExample)
FR (1) FR2044576A5 (enExample)
GB (1) GB1317823A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0000259A1 (en) * 1977-06-23 1979-01-10 Europäische Atomgemeinschaft (Euratom) Process and apparatus for the alignment of a transducer forming part of a radiation generator

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2180117B (en) * 1985-09-05 1989-09-06 Ferranti Plc Three-dimensional position measuring apparatus
GB2285550B (en) * 1994-01-05 1997-09-17 Creo Products Inc Optical coordinate measuring system for large objects

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0000259A1 (en) * 1977-06-23 1979-01-10 Europäische Atomgemeinschaft (Euratom) Process and apparatus for the alignment of a transducer forming part of a radiation generator

Also Published As

Publication number Publication date
DE2026069A1 (de) 1970-12-03
GB1317823A (en) 1973-05-23

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Legal Events

Date Code Title Description
ST Notification of lapse