FR2041865A5 - - Google Patents

Info

Publication number
FR2041865A5
FR2041865A5 FR6911444A FR6911444A FR2041865A5 FR 2041865 A5 FR2041865 A5 FR 2041865A5 FR 6911444 A FR6911444 A FR 6911444A FR 6911444 A FR6911444 A FR 6911444A FR 2041865 A5 FR2041865 A5 FR 2041865A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR6911444A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
APPLIED RES LAB
Original Assignee
APPLIED RES LAB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US561997A priority Critical patent/US3479505A/en
Application filed by APPLIED RES LAB filed Critical APPLIED RES LAB
Priority to FR6911444A priority patent/FR2041865A5/fr
Priority to DE19691919880 priority patent/DE1919880A1/de
Priority claimed from DE19691919880 external-priority patent/DE1919880A1/de
Application granted granted Critical
Publication of FR2041865A5 publication Critical patent/FR2041865A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR6911444A 1966-06-30 1969-04-14 Expired FR2041865A5 (enrdf_load_stackoverflow)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US561997A US3479505A (en) 1966-06-30 1966-06-30 Method of operating an ion microprobe using secondary elections
FR6911444A FR2041865A5 (enrdf_load_stackoverflow) 1966-06-30 1969-04-14
DE19691919880 DE1919880A1 (de) 1969-04-14 1969-04-18 Verfahren zum Betreiben einer Ionensonde

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US56199766A 1966-06-30 1966-06-30
FR6911444A FR2041865A5 (enrdf_load_stackoverflow) 1966-06-30 1969-04-14
DE19691919880 DE1919880A1 (de) 1969-04-14 1969-04-18 Verfahren zum Betreiben einer Ionensonde

Publications (1)

Publication Number Publication Date
FR2041865A5 true FR2041865A5 (enrdf_load_stackoverflow) 1971-02-05

Family

ID=27616982

Family Applications (1)

Application Number Title Priority Date Filing Date
FR6911444A Expired FR2041865A5 (enrdf_load_stackoverflow) 1966-06-30 1969-04-14

Country Status (2)

Country Link
US (1) US3479505A (enrdf_load_stackoverflow)
FR (1) FR2041865A5 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0425204A3 (en) * 1989-10-23 1992-01-02 Hitachi, Ltd. Secondary ion mass analyzing apparatus

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034439B1 (enrdf_load_stackoverflow) * 1969-05-16 1975-11-08
JPS5129437B1 (enrdf_load_stackoverflow) * 1970-08-19 1976-08-25
US4629898A (en) * 1981-10-02 1986-12-16 Oregon Graduate Center Electron and ion beam apparatus and passivation milling

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3103584A (en) * 1963-09-10 Electron microanalyzer system
CH391912A (de) * 1961-11-09 1965-05-15 Trueb Taeuber & Co Ag Verfahren zur Sichtbarmachung und Aufnahme von elektronenoptischen Bildern

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0425204A3 (en) * 1989-10-23 1992-01-02 Hitachi, Ltd. Secondary ion mass analyzing apparatus

Also Published As

Publication number Publication date
US3479505A (en) 1969-11-18

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Legal Events

Date Code Title Description
ST Notification of lapse