FR2031266A5 - - Google Patents

Info

Publication number
FR2031266A5
FR2031266A5 FR7003255A FR7003255A FR2031266A5 FR 2031266 A5 FR2031266 A5 FR 2031266A5 FR 7003255 A FR7003255 A FR 7003255A FR 7003255 A FR7003255 A FR 7003255A FR 2031266 A5 FR2031266 A5 FR 2031266A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7003255A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schunk and Ebe GmbH
Original Assignee
Schunk and Ebe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schunk and Ebe GmbH filed Critical Schunk and Ebe GmbH
Application granted granted Critical
Publication of FR2031266A5 publication Critical patent/FR2031266A5/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Resistance Heating (AREA)
  • Carbon And Carbon Compounds (AREA)
FR7003255A 1969-02-13 1970-01-30 Expired FR2031266A5 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691907076 DE1907076A1 (de) 1969-02-13 1969-02-13 Graphitheiz- und/oder -traegerelement

Publications (1)

Publication Number Publication Date
FR2031266A5 true FR2031266A5 (de) 1970-11-13

Family

ID=5725061

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7003255A Expired FR2031266A5 (de) 1969-02-13 1970-01-30

Country Status (4)

Country Link
DE (1) DE1907076A1 (de)
FR (1) FR2031266A5 (de)
GB (1) GB1305454A (de)
NL (1) NL7002110A (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2825013A1 (de) * 1978-06-07 1979-12-13 Concordia Sprecher Schalt Lasttrennschalter in einschub-bauweise
US4582561A (en) * 1979-01-25 1986-04-15 Sharp Kabushiki Kaisha Method for making a silicon carbide substrate
JPS5610921A (en) 1979-07-09 1981-02-03 Toshiba Ceramics Co Ltd Material for equipment for manufacturing semiconductor and its treating furnace
DE3505795A1 (de) * 1985-02-20 1986-08-21 BBC Aktiengesellschaft Brown, Boveri & Cie., Baden, Aargau Verfahren zur kontrollierten aenderung eines temperaturgradienten in einem substrat unter konstanthaltung einer vorgebbaren mittleren temperatur
JPH07176482A (ja) * 1991-05-31 1995-07-14 At & T Corp エピタキシャル成長方法および装置
US6965156B1 (en) 2002-12-27 2005-11-15 Actel Corporation Amorphous carbon metal-to-metal antifuse with adhesion promoting layers
US7459763B1 (en) 2001-10-02 2008-12-02 Actel Corporation Reprogrammable metal-to-metal antifuse employing carbon-containing antifuse material
US20030062596A1 (en) * 2001-10-02 2003-04-03 Actel Corporation Metal-to-metal antifuse employing carbon-containing antifuse material
US7390726B1 (en) 2001-10-02 2008-06-24 Actel Corporation Switching ratio and on-state resistance of an antifuse programmed below 5 mA and having a Ta or TaN barrier metal layer

Also Published As

Publication number Publication date
GB1305454A (de) 1973-01-31
DE1907076A1 (de) 1970-09-03
NL7002110A (de) 1970-08-17

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Legal Events

Date Code Title Description
ST Notification of lapse