FR2020229A1 - - Google Patents
Info
- Publication number
- FR2020229A1 FR2020229A1 FR6934386A FR6934386A FR2020229A1 FR 2020229 A1 FR2020229 A1 FR 2020229A1 FR 6934386 A FR6934386 A FR 6934386A FR 6934386 A FR6934386 A FR 6934386A FR 2020229 A1 FR2020229 A1 FR 2020229A1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3063—Electrolytic etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/2205—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities from the substrate during epitaxy, e.g. autodoping; Preventing or using autodoping
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Weting (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL6814415A NL6814415A (en) | 1968-10-09 | 1968-10-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2020229A1 true FR2020229A1 (en) | 1970-07-10 |
FR2020229B1 FR2020229B1 (en) | 1974-03-15 |
Family
ID=19804886
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR6934386A Expired FR2020229B1 (en) | 1968-10-09 | 1969-10-08 |
Country Status (7)
Country | Link |
---|---|
BE (1) | BE739941A (en) |
BR (1) | BR6913205D0 (en) |
CH (1) | CH504106A (en) |
FR (1) | FR2020229B1 (en) |
GB (1) | GB1289147A (en) |
NL (1) | NL6814415A (en) |
SE (1) | SE344141B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0181714A1 (en) * | 1984-10-24 | 1986-05-21 | Marconi Instruments Limited | Method of fabrication devices on semiconductor substrates |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3418226A (en) * | 1965-05-18 | 1968-12-24 | Ibm | Method of electrolytically etching a semiconductor having a single impurity gradient |
-
1968
- 1968-10-09 NL NL6814415A patent/NL6814415A/xx unknown
-
1969
- 1969-10-06 CH CH1499969A patent/CH504106A/en not_active IP Right Cessation
- 1969-10-07 SE SE1378869A patent/SE344141B/xx unknown
- 1969-10-07 BE BE739941D patent/BE739941A/xx unknown
- 1969-10-08 FR FR6934386A patent/FR2020229B1/fr not_active Expired
- 1969-10-08 GB GB1289147D patent/GB1289147A/en not_active Expired
- 1969-10-09 BR BR21320569A patent/BR6913205D0/en unknown
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3418226A (en) * | 1965-05-18 | 1968-12-24 | Ibm | Method of electrolytically etching a semiconductor having a single impurity gradient |
Non-Patent Citations (2)
Title |
---|
REVUE AMERICAINE JOURNAL OF THE ELECTRO-CHEMICAL SOCIETY,VOL. 107, OCTOBRE 1960, "ON THE MECHANISM OF CHEMICALLY ETCHING * |
REVUE AMERICAINE TRANSACTIONS OF THE METALLURGICAL SOCIETY OF AIME, VOL. 233, MARS 1965, "ADVANCED EPITAXIAL PROCESS FOR MONOLITHIC INTEGRATED-CIRCUIT APPLICATIONS D.M.JACKSON JR. PAGES 596-602 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0181714A1 (en) * | 1984-10-24 | 1986-05-21 | Marconi Instruments Limited | Method of fabrication devices on semiconductor substrates |
Also Published As
Publication number | Publication date |
---|---|
BR6913205D0 (en) | 1973-01-11 |
BE739941A (en) | 1970-04-07 |
NL6814415A (en) | 1970-04-13 |
CH504106A (en) | 1971-02-28 |
FR2020229B1 (en) | 1974-03-15 |
DE1950533B2 (en) | 1976-06-24 |
GB1289147A (en) | 1972-09-13 |
SE344141B (en) | 1972-03-27 |
DE1950533A1 (en) | 1970-04-23 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |