FR2013091A1 - - Google Patents

Info

Publication number
FR2013091A1
FR2013091A1 FR6923186A FR6923186A FR2013091A1 FR 2013091 A1 FR2013091 A1 FR 2013091A1 FR 6923186 A FR6923186 A FR 6923186A FR 6923186 A FR6923186 A FR 6923186A FR 2013091 A1 FR2013091 A1 FR 2013091A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR6923186A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
APPLIED RES LAB
Original Assignee
APPLIED RES LAB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by APPLIED RES LAB filed Critical APPLIED RES LAB
Publication of FR2013091A1 publication Critical patent/FR2013091A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
FR6923186A 1968-07-17 1969-07-08 Withdrawn FR2013091A1 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US74542768A 1968-07-17 1968-07-17

Publications (1)

Publication Number Publication Date
FR2013091A1 true FR2013091A1 (enrdf_load_stackoverflow) 1970-03-27

Family

ID=24996636

Family Applications (1)

Application Number Title Priority Date Filing Date
FR6923186A Withdrawn FR2013091A1 (enrdf_load_stackoverflow) 1968-07-17 1969-07-08

Country Status (4)

Country Link
US (1) US3558878A (enrdf_load_stackoverflow)
DE (1) DE1935975A1 (enrdf_load_stackoverflow)
FR (1) FR2013091A1 (enrdf_load_stackoverflow)
GB (1) GB1225579A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4599869A (en) * 1984-03-12 1986-07-15 Ozin Geoffrey A Cryogenic deposition of catalysts
US6046457A (en) * 1998-01-09 2000-04-04 International Business Machines Corporation Charged particle beam apparatus having anticontamination means
US6188071B1 (en) * 1998-08-11 2001-02-13 Nikon Corporation Feedback method for increasing stability of electron beams
US7408728B2 (en) * 2006-12-04 2008-08-05 Quality Vision International, Inc. System and method for focal length stabilization using active temperature control

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3008044A (en) * 1960-02-25 1961-11-07 Gen Electric Application of superconductivity in guiding charged particles
US3107297A (en) * 1960-08-29 1963-10-15 Applied Res Lab Inc Electron probe X-ray analyzer wherein the emitted X-radiation passes through the objective lens
DE1202915B (de) * 1963-09-09 1965-10-14 Siemens Ag An der Pumpe arbeitender Korpuskularstrahl-apparat, insbesondere Elektronenmikroskop, mit einer den Objekttraeger aufnehmenden und mit einer Tiefkuehlvorrichtung in Verbindung stehenden Objektpatrone

Also Published As

Publication number Publication date
DE1935975A1 (de) 1970-01-22
US3558878A (en) 1971-01-26
GB1225579A (enrdf_load_stackoverflow) 1971-03-17

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Legal Events

Date Code Title Description
ST Notification of lapse