FR2010604A1 - - Google Patents

Info

Publication number
FR2010604A1
FR2010604A1 FR6919174A FR6919174A FR2010604A1 FR 2010604 A1 FR2010604 A1 FR 2010604A1 FR 6919174 A FR6919174 A FR 6919174A FR 6919174 A FR6919174 A FR 6919174A FR 2010604 A1 FR2010604 A1 FR 2010604A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR6919174A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of FR2010604A1 publication Critical patent/FR2010604A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/27—Control of temperature characterised by the use of electric means with sensing element responsive to radiation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Measuring Fluid Pressure (AREA)
FR6919174A 1968-06-10 1969-06-10 Withdrawn FR2010604A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU1247754A SU469163A1 (en) 1968-06-10 1968-06-10 Electron beam thermal installation

Publications (1)

Publication Number Publication Date
FR2010604A1 true FR2010604A1 (en) 1970-02-20

Family

ID=20442679

Family Applications (1)

Application Number Title Priority Date Filing Date
FR6919174A Withdrawn FR2010604A1 (en) 1968-06-10 1969-06-10

Country Status (7)

Country Link
AT (1) AT304716B (en)
BE (1) BE734363A (en)
CS (1) CS162029B1 (en)
FR (1) FR2010604A1 (en)
GB (1) GB1263532A (en)
SE (1) SE360539B (en)
SU (1) SU469163A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100263590A1 (en) * 2008-12-01 2010-10-21 United Technologies Corporation Vapor Deposition Electron Beam Current Control

Also Published As

Publication number Publication date
CS162029B1 (en) 1975-07-15
DE1929446A1 (en) 1970-01-02
BE734363A (en) 1969-12-10
AT304716B (en) 1973-01-25
GB1263532A (en) 1972-02-09
DE1929446B2 (en) 1972-07-27
SU469163A1 (en) 1975-04-30
SE360539B (en) 1973-09-24

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Legal Events

Date Code Title Description
ST Notification of lapse