DE1805582B2 - - Google Patents

Info

Publication number
DE1805582B2
DE1805582B2 DE19681805582 DE1805582A DE1805582B2 DE 1805582 B2 DE1805582 B2 DE 1805582B2 DE 19681805582 DE19681805582 DE 19681805582 DE 1805582 A DE1805582 A DE 1805582A DE 1805582 B2 DE1805582 B2 DE 1805582B2
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19681805582
Other languages
German (de)
Other versions
DE1805582A1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of DE1805582A1 publication Critical patent/DE1805582A1/en
Publication of DE1805582B2 publication Critical patent/DE1805582B2/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1906—Control of temperature characterised by the use of electric means using an analogue comparing device
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
    • G05D23/22—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature the sensing element being a thermocouple

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Control Of Temperature (AREA)
DE19681805582 1968-04-29 1968-10-23 Device for heating a preparation introduced into a corpuscular beam device Pending DE1805582A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH637168 1968-04-29

Publications (2)

Publication Number Publication Date
DE1805582A1 DE1805582A1 (en) 1969-11-06
DE1805582B2 true DE1805582B2 (en) 1970-10-15

Family

ID=4308525

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19681805582 Pending DE1805582A1 (en) 1968-04-29 1968-10-23 Device for heating a preparation introduced into a corpuscular beam device

Country Status (1)

Country Link
DE (1) DE1805582A1 (en)

Also Published As

Publication number Publication date
DE1805582A1 (en) 1969-11-06

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Legal Events

Date Code Title Description
SH Request for examination between 03.10.1968 and 22.04.1971