FR1603217A - - Google Patents
Info
- Publication number
- FR1603217A FR1603217A FR1603217DA FR1603217A FR 1603217 A FR1603217 A FR 1603217A FR 1603217D A FR1603217D A FR 1603217DA FR 1603217 A FR1603217 A FR 1603217A
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR170008 | 1968-10-15 | ||
| FR170009 | 1968-10-15 | ||
| FR170007 | 1968-10-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR1603217A true FR1603217A (es) | 1971-03-22 |
Family
ID=27244897
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR1594667D Expired FR1594667A (es) | 1968-10-15 | 1968-10-15 | |
| FR1594668D Expired FR1594668A (es) | 1968-10-15 | 1968-10-15 | |
| FR1603217D Expired FR1603217A (es) | 1968-10-15 | 1968-10-15 |
Family Applications Before (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR1594667D Expired FR1594667A (es) | 1968-10-15 | 1968-10-15 | |
| FR1594668D Expired FR1594668A (es) | 1968-10-15 | 1968-10-15 |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE1951735A1 (es) |
| FR (3) | FR1594667A (es) |
| GB (1) | GB1284781A (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2512270A1 (fr) * | 1981-02-23 | 1983-03-04 | Sablev Leonid | Cathode consommable pour evaporateur de metaux a arc electrique |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5850312B2 (ja) * | 1981-02-18 | 1983-11-09 | 株式会社日立製作所 | スパツタリング装置 |
| GB2228948A (en) * | 1989-02-28 | 1990-09-12 | British Aerospace | Fabrication of thin films from a composite target |
| GB9901093D0 (en) * | 1999-01-20 | 1999-03-10 | Marconi Electronic Syst Ltd | Method of making coatings |
| US6635154B2 (en) * | 2001-11-03 | 2003-10-21 | Intevac, Inc. | Method and apparatus for multi-target sputtering |
-
1968
- 1968-10-15 FR FR1594667D patent/FR1594667A/fr not_active Expired
- 1968-10-15 FR FR1594668D patent/FR1594668A/fr not_active Expired
- 1968-10-15 FR FR1603217D patent/FR1603217A/fr not_active Expired
-
1969
- 1969-10-14 DE DE19691951735 patent/DE1951735A1/de active Pending
- 1969-10-15 GB GB5070969A patent/GB1284781A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2512270A1 (fr) * | 1981-02-23 | 1983-03-04 | Sablev Leonid | Cathode consommable pour evaporateur de metaux a arc electrique |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1284781A (en) | 1972-08-09 |
| DE1951735A1 (de) | 1970-04-30 |
| FR1594668A (es) | 1970-06-08 |
| FR1594667A (es) | 1970-06-08 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |