FR1587573A - - Google Patents

Info

Publication number
FR1587573A
FR1587573A FR1587573DA FR1587573A FR 1587573 A FR1587573 A FR 1587573A FR 1587573D A FR1587573D A FR 1587573DA FR 1587573 A FR1587573 A FR 1587573A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1587573A publication Critical patent/FR1587573A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • G05D3/20—Control of position or direction using feedback using a digital comparing device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
FR1587573D 1968-10-25 1968-10-25 Expired FR1587573A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR171342 1968-10-25

Publications (1)

Publication Number Publication Date
FR1587573A true FR1587573A (zh) 1970-03-20

Family

ID=8656116

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1587573D Expired FR1587573A (zh) 1968-10-25 1968-10-25

Country Status (4)

Country Link
DE (1) DE1953712C3 (zh)
FR (1) FR1587573A (zh)
GB (1) GB1275577A (zh)
SE (1) SE362987B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991017564A1 (en) * 1990-04-30 1991-11-14 International Business Machines Corporation Servo guided stage system

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8204450A (nl) * 1982-11-17 1984-06-18 Philips Nv Verplaatsingsinrichting, in het bijzonder voor het stralingslithografisch behandelen van een substraat.
JPS59129633A (ja) * 1983-01-08 1984-07-26 Canon Inc ステージ装置
SK86594A3 (en) * 1992-11-16 1995-01-12 Winterhalter Gastronom Gmbh Dish-washing machine
US7298495B2 (en) * 2005-06-23 2007-11-20 Lewis George C System and method for positioning an object through use of a rotating laser metrology system
CN107665827B (zh) * 2016-07-29 2020-01-24 上海微电子装备（集团）股份有限公司 芯片键合装置和方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991017564A1 (en) * 1990-04-30 1991-11-14 International Business Machines Corporation Servo guided stage system

Also Published As

Publication number Publication date
SE362987B (zh) 1973-12-27
GB1275577A (en) 1972-05-24
DE1953712B2 (de) 1979-09-06
DE1953712C3 (de) 1980-06-26
DE1953712A1 (de) 1970-06-18

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Legal Events

Date Code Title Description
ST Notification of lapse