FR1577813A - - Google Patents

Info

Publication number
FR1577813A
FR1577813A FR1577813DA FR1577813A FR 1577813 A FR1577813 A FR 1577813A FR 1577813D A FR1577813D A FR 1577813DA FR 1577813 A FR1577813 A FR 1577813A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19671622385 external-priority patent/DE1622385C3/de
Application filed filed Critical
Application granted granted Critical
Publication of FR1577813A publication Critical patent/FR1577813A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/90—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof prepared by montage processes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Printing Methods (AREA)
FR1577813D 1967-08-30 1968-08-28 Expired FR1577813A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19671622385 DE1622385C3 (de) 1967-08-30 1967-08-30 Verfahren zur Herstellung von Aufsichts- oder Durchsichtsvorlagen

Publications (1)

Publication Number Publication Date
FR1577813A true FR1577813A (fr) 1969-08-08

Family

ID=5682640

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1577813D Expired FR1577813A (fr) 1967-08-30 1968-08-28

Country Status (3)

Country Link
CH (1) CH552470A (fr)
FR (1) FR1577813A (fr)
GB (1) GB1245474A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2132789A (en) * 1982-11-24 1984-07-11 Western Electric Co Method of pattern generation

Also Published As

Publication number Publication date
GB1245474A (en) 1971-09-08
CH552470A (de) 1974-08-15

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Legal Events

Date Code Title Description
ST Notification of lapse