FR1576184A - - Google Patents

Info

Publication number
FR1576184A
FR1576184A FR1576184DA FR1576184A FR 1576184 A FR1576184 A FR 1576184A FR 1576184D A FR1576184D A FR 1576184DA FR 1576184 A FR1576184 A FR 1576184A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1576184A publication Critical patent/FR1576184A/fr
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/102—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being able to rotate freely due to a frictional contact with the lapping tool
FR1576184D 1967-08-10 1968-08-09 Expired FR1576184A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US65978067A 1967-08-10 1967-08-10

Publications (1)

Publication Number Publication Date
FR1576184A true FR1576184A (en) 1969-07-25

Family

ID=24646812

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1576184D Expired FR1576184A (en) 1967-08-10 1968-08-09

Country Status (5)

Country Link
US (1) US3518798A (en)
DE (1) DE1752940A1 (en)
FR (1) FR1576184A (en)
GB (1) GB1196875A (en)
NL (1) NL6811056A (en)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3708921A (en) * 1970-08-17 1973-01-09 Monsanto Co Apparatus and process for polishing semiconductor or similar materials
US3680265A (en) * 1970-12-10 1972-08-01 Corning Glass Works Lapping machine
US3731435A (en) * 1971-02-09 1973-05-08 Speedfam Corp Polishing machine load plate
US4020600A (en) * 1976-08-13 1977-05-03 Spitfire Tool & Machine Co., Inc. Polishing fixture
US4165584A (en) * 1977-01-27 1979-08-28 International Telephone And Telegraph Corporation Apparatus for lapping or polishing materials
US5187901A (en) * 1990-02-02 1993-02-23 Speedfam Corporation Circumferential pattern finishing machine
US5123218A (en) * 1990-02-02 1992-06-23 Speedfam Corporation Circumferential pattern finishing method
US5267418A (en) * 1992-05-27 1993-12-07 International Business Machines Corporation Confined water fixture for holding wafers undergoing chemical-mechanical polishing
US5908530A (en) * 1995-05-18 1999-06-01 Obsidian, Inc. Apparatus for chemical mechanical polishing
US5738574A (en) * 1995-10-27 1998-04-14 Applied Materials, Inc. Continuous processing system for chemical mechanical polishing
US5951373A (en) * 1995-10-27 1999-09-14 Applied Materials, Inc. Circumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaning
US5804507A (en) * 1995-10-27 1998-09-08 Applied Materials, Inc. Radially oscillating carousel processing system for chemical mechanical polishing
US7097544B1 (en) * 1995-10-27 2006-08-29 Applied Materials Inc. Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
US6110025A (en) * 1997-05-07 2000-08-29 Obsidian, Inc. Containment ring for substrate carrier apparatus
US6116990A (en) * 1997-07-25 2000-09-12 Applied Materials, Inc. Adjustable low profile gimbal system for chemical mechanical polishing
US6488565B1 (en) 2000-08-29 2002-12-03 Applied Materials, Inc. Apparatus for chemical mechanical planarization having nested load cups
US6709322B2 (en) * 2001-03-29 2004-03-23 Lam Research Corporation Apparatus for aligning a surface of an active retainer ring with a wafer surface for chemical mechanical polishing
US6942545B2 (en) * 2001-04-20 2005-09-13 Oriol, Inc. Apparatus and method for sequentially polishing and loading/unloading semiconductor wafers
CN105751059A (en) * 2016-04-29 2016-07-13 新昌县羽林街道宏博机械厂 End surface grinding machine for bearing machining
CN108203927A (en) * 2018-01-12 2018-06-26 佛山诗勤智能科技有限公司 A kind of novel bridge constructing device
US11705354B2 (en) 2020-07-10 2023-07-18 Applied Materials, Inc. Substrate handling systems
CN116394140B (en) * 2023-05-30 2023-08-08 山西建邦集团铸造有限公司 Surface treatment device and treatment method for metal casting

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1100845A (en) * 1913-04-08 1914-06-23 Corp Of Ges Des Aechten Naxos Schmirgels Naxos Union Schmirgel Dampfwerk Frankfurt A M Julius Pfungs Manufacture of grinding apparatus.
FR863711A (en) * 1939-03-07 1941-04-08 Improvements in devices for the automatic polishing of industrial materials (metals, ores, rocks, etc.) for microscopic study
US2968135A (en) * 1958-04-07 1961-01-17 Abrading Systems Company Lapping machine
US3090169A (en) * 1961-05-11 1963-05-21 Stephen A Boettcher Lapping machine fixture
US3377750A (en) * 1965-08-16 1968-04-16 Spitfire Tool & Machine Co Inc Self-positioning combination work holder and dressing ring for flat lapping machines

Also Published As

Publication number Publication date
US3518798A (en) 1970-07-07
GB1196875A (en) 1970-07-01
NL6811056A (en) 1969-02-12
DE1752940A1 (en) 1971-04-15

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Legal Events

Date Code Title Description
ST Notification of lapse