FR1574686A - - Google Patents

Info

Publication number
FR1574686A
FR1574686A FR1574686DA FR1574686A FR 1574686 A FR1574686 A FR 1574686A FR 1574686D A FR1574686D A FR 1574686DA FR 1574686 A FR1574686 A FR 1574686A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1574686A publication Critical patent/FR1574686A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
FR1574686D 1968-01-11 1968-01-11 Expired FR1574686A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR135568 1968-01-11
FR6009034 1968-02-21

Publications (1)

Publication Number Publication Date
FR1574686A true FR1574686A (fr) 1969-07-18

Family

ID=26181721

Family Applications (2)

Application Number Title Priority Date Filing Date
FR1574686D Expired FR1574686A (fr) 1968-01-11 1968-01-11
FR1562286D Expired FR1562286A (fr) 1968-01-11 1968-02-21

Family Applications After (1)

Application Number Title Priority Date Filing Date
FR1562286D Expired FR1562286A (fr) 1968-01-11 1968-02-21

Country Status (3)

Country Link
DE (1) DE1908310A1 (fr)
FR (2) FR1574686A (fr)
GB (1) GB1186669A (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4313815A (en) * 1978-04-07 1982-02-02 Varian Associates, Inc. Sputter-coating system, and vaccuum valve, transport, and sputter source array arrangements therefor
GB2040315B (en) * 1978-12-13 1983-05-11 Glyco Metall Werke Laminar material or element and a process for its manufacture
DE2940369C2 (de) * 1979-10-05 1982-10-21 W.C. Heraeus Gmbh, 6450 Hanau Target
DE3030320A1 (de) * 1980-08-11 1982-03-11 W.C. Heraeus Gmbh, 6450 Hanau Verfahren zur herstellung eines targets fuer kathodenzerstaeubung
FR2573441B1 (fr) * 1984-11-19 1987-08-07 Cit Alcatel Cathode-cible pour depot, par pulverisation, d'un materiau composite sur un substrat
GB9622913D0 (en) * 1996-11-04 1997-01-08 Boc Group Plc Sputtering processes and apparatus
US20070134500A1 (en) * 2005-12-14 2007-06-14 Klaus Hartig Sputtering targets and methods for depositing film containing tin and niobium
KR20120130518A (ko) * 2011-05-23 2012-12-03 삼성디스플레이 주식회사 스퍼터링용 분할 타겟 장치 및 그것을 이용한 스퍼터링 방법

Also Published As

Publication number Publication date
GB1186669A (en) 1970-04-02
FR1562286A (fr) 1969-04-04
DE1908310A1 (de) 1969-09-25

Similar Documents

Publication Publication Date Title
AU1946070A (fr)
AU428130B2 (fr)
AU2374870A (fr)
AU5184069A (fr)
AU6168869A (fr)
AU6171569A (fr)
AU416157B2 (fr)
AU429879B2 (fr)
AU2581067A (fr)
AU4811568A (fr)
AU421558B1 (fr)
AU4744468A (fr)
AU2580267A (fr)
AU3224368A (fr)
AU3789668A (fr)
BE630165A (fr)
BE708888A (fr)
AU463027A (fr)
AU4503667A (fr)
AU479393A (fr)
AU479894A (fr)
BE708933A (fr)
AU4464266A (fr)
BE709095A (fr)
AU5758767A (fr)

Legal Events

Date Code Title Description
ST Notification of lapse