FR1572367A - - Google Patents

Info

Publication number
FR1572367A
FR1572367A FR148053A FR1572367DA FR1572367A FR 1572367 A FR1572367 A FR 1572367A FR 148053 A FR148053 A FR 148053A FR 1572367D A FR1572367D A FR 1572367DA FR 1572367 A FR1572367 A FR 1572367A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR148053A
Other languages
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1572367A publication Critical patent/FR1572367A/fr
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
FR148053A 1968-04-12 1968-04-12 Expired FR1572367A (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR148053 1968-04-12

Publications (1)

Publication Number Publication Date
FR1572367A true FR1572367A (da) 1969-06-27

Family

ID=8648952

Family Applications (1)

Application Number Title Priority Date Filing Date
FR148053A Expired FR1572367A (da) 1968-04-12 1968-04-12

Country Status (4)

Country Link
US (1) US3614512A (da)
DE (1) DE1915410A1 (da)
FR (1) FR1572367A (da)
GB (1) GB1223096A (da)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5916220B2 (ja) * 1974-05-21 1984-04-13 工業技術院長 コロナ放電による電空変換方法
FR2550681B1 (fr) * 1983-08-12 1985-12-06 Centre Nat Rech Scient Source d'ions a au moins deux chambres d'ionisation, en particulier pour la formation de faisceaux d'ions chimiquement reactifs
DE19921744B4 (de) * 1999-05-11 2008-04-30 Applied Materials Gmbh & Co. Kg Verfahren zum Transport von mindestens einer dampfförmigen Substanz durch die Wand einer Vakuumkammer in die Vakuumkammer sowie Vorrichtung zur Durchführung des Verfahrens und deren Verwendung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR929228A (fr) * 1946-06-17 1947-12-19 Csf Perfectionnement aux générateurs d'ions
GB1158782A (en) * 1965-05-14 1969-07-16 Nat Res Dev Improvements in or relating to Oscillation Generators
US3421035A (en) * 1966-07-27 1969-01-07 Bell & Howell Co Tubular ion source for high efficiency ion generation

Also Published As

Publication number Publication date
GB1223096A (en) 1971-02-24
US3614512A (en) 1971-10-19
DE1915410A1 (de) 1969-11-06

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Legal Events

Date Code Title Description
ST Notification of lapse