FR1571060A - - Google Patents

Info

Publication number
FR1571060A
FR1571060A FR1571060DA FR1571060A FR 1571060 A FR1571060 A FR 1571060A FR 1571060D A FR1571060D A FR 1571060DA FR 1571060 A FR1571060 A FR 1571060A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1571060A publication Critical patent/FR1571060A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70041—Production of exposure light, i.e. light sources by pulsed sources, e.g. multiplexing, pulse duration, interval control or intensity control
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C5/00—Photographic processes or agents therefor; Regeneration of such processing agents
    • G03C5/04—Photo-taking processes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70558—Dose control, i.e. achievement of a desired dose
FR1571060D 1967-07-03 1968-06-19 Expired FR1571060A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US65094567A 1967-07-03 1967-07-03

Publications (1)

Publication Number Publication Date
FR1571060A true FR1571060A (en) 1969-06-13

Family

ID=24610962

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1571060D Expired FR1571060A (en) 1967-07-03 1968-06-19

Country Status (3)

Country Link
US (1) US3634084A (en)
DE (1) DE1772721A1 (en)
FR (1) FR1571060A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3881821A (en) * 1971-03-10 1975-05-06 Brady Co W H Apparatus and method especially useful in label making
US4329421A (en) * 1980-01-07 1982-05-11 Armstrong Cork Company Use of flashed radiant energy in producing relief images in resinous coating
DE4135591C2 (en) * 1991-10-29 1994-09-15 Hans Dr Theidel Process for making copies that can only be read in UV-A light

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2763180A (en) * 1953-07-22 1956-09-18 Robert C Beck Apparatus for photographic printing
GB1055073A (en) * 1964-06-15 1967-01-11 Ibm Improvements in or relating to photographic processes
US3451813A (en) * 1967-10-03 1969-06-24 Monsanto Co Method of making printed circuits

Also Published As

Publication number Publication date
DE1772721A1 (en) 1971-06-03
US3634084A (en) 1972-01-11

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Legal Events

Date Code Title Description
ST Notification of lapse