FR1569830A - - Google Patents

Info

Publication number
FR1569830A
FR1569830A FR147120A FR1569830DA FR1569830A FR 1569830 A FR1569830 A FR 1569830A FR 147120 A FR147120 A FR 147120A FR 1569830D A FR1569830D A FR 1569830DA FR 1569830 A FR1569830 A FR 1569830A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR147120A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR105259A external-priority patent/FR1529768A/fr
Application filed filed Critical
Application granted granted Critical
Publication of FR1569830A publication Critical patent/FR1569830A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence
FR147120A 1967-05-05 1968-04-05 Expired FR1569830A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR105259A FR1529768A (fr) 1967-05-05 1967-05-05 Procédé et appareillage pour le contrôle de l'élaboration thermique d'un matériau dans une enceinte
FR147120 1968-04-05

Publications (1)

Publication Number Publication Date
FR1569830A true FR1569830A (fr) 1969-06-06

Family

ID=26176186

Family Applications (1)

Application Number Title Priority Date Filing Date
FR147120A Expired FR1569830A (fr) 1967-05-05 1968-04-05

Country Status (6)

Country Link
US (1) US3585385A (fr)
CH (1) CH476995A (fr)
DE (1) DE1765323B1 (fr)
FR (1) FR1569830A (fr)
GB (1) GB1224233A (fr)
NL (1) NL150617B (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3780256A (en) * 1972-08-08 1973-12-18 Atomic Energy Commission Method for producing spike-free electron beam partial penetration welds
US4348576A (en) * 1979-01-12 1982-09-07 Steigerwald Strahltechnik Gmbh Position regulation of a charge carrier beam
US4659437A (en) * 1985-01-19 1987-04-21 Tokusen Kogyo Kabushiki Kaisha Method of thermal diffusion alloy plating for steel wire on continuous basis
US6777676B1 (en) * 2002-07-05 2004-08-17 Kla-Tencor Technologies Corporation Non-destructive root cause analysis on blocked contact or via

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3103584A (en) * 1963-09-10 Electron microanalyzer system
US3080481A (en) * 1959-04-17 1963-03-05 Sprague Electric Co Method of making transistors
US3204095A (en) * 1960-12-21 1965-08-31 Hitachi Ltd Electron probe microanalyzer with means to eliminate the effect of surface irregularities
NL289708A (fr) * 1962-03-05
US3196246A (en) * 1962-11-29 1965-07-20 Rca Corp Means for observing a workpiece in electron beam machining apparatus
BE634419A (fr) * 1963-07-02 1964-01-02
DE1245613B (de) * 1964-04-01 1967-07-27 Ass Sans But Lucratif Spektrometer, bestehend aus einem Hochvakuumbehaelter mit einer von einer schraegen Ebene umrandeten OEffnung

Also Published As

Publication number Publication date
GB1224233A (en) 1971-03-03
NL150617B (nl) 1976-08-16
US3585385A (en) 1971-06-15
CH476995A (fr) 1969-08-15
DE1765323B1 (de) 1972-04-27
NL6806335A (fr) 1968-11-06

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Legal Events

Date Code Title Description
ST Notification of lapse