FR1542510A - Method and device for adjusting thin film resistors by thermal oxidation - Google Patents

Method and device for adjusting thin film resistors by thermal oxidation

Info

Publication number
FR1542510A
FR1542510A FR110045A FR110045A FR1542510A FR 1542510 A FR1542510 A FR 1542510A FR 110045 A FR110045 A FR 110045A FR 110045 A FR110045 A FR 110045A FR 1542510 A FR1542510 A FR 1542510A
Authority
FR
France
Prior art keywords
thin film
thermal oxidation
film resistors
adjusting thin
adjusting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR110045A
Other languages
French (fr)
Inventor
Georges Vulliez
Jean Claude Marquet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel SA filed Critical Alcatel SA
Priority to FR110045A priority Critical patent/FR1542510A/en
Priority to NL686808204A priority patent/NL149319B/en
Priority to DE1765567A priority patent/DE1765567C3/en
Priority to US736206A priority patent/US3546015A/en
Priority to GB27911/68A priority patent/GB1176295A/en
Application granted granted Critical
Publication of FR1542510A publication Critical patent/FR1542510A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/26—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by converting resistive material
    • H01C17/265—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by converting resistive material by chemical or thermal treatment, e.g. oxydation, reduction, annealing

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
FR110045A 1967-06-12 1967-06-12 Method and device for adjusting thin film resistors by thermal oxidation Expired FR1542510A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR110045A FR1542510A (en) 1967-06-12 1967-06-12 Method and device for adjusting thin film resistors by thermal oxidation
NL686808204A NL149319B (en) 1967-06-12 1968-06-11 PROCEDURE FOR THE MANUFACTURE OF THIN METAL-CONTAINING RESISTANCE FLAVORS AND RESISTANT FLAVORS THIS MANUFACTURED.
DE1765567A DE1765567C3 (en) 1967-06-12 1968-06-11 Process for stabilizing and balancing thin-film resistors
US736206A US3546015A (en) 1967-06-12 1968-06-11 Thin layer resistors
GB27911/68A GB1176295A (en) 1967-06-12 1968-06-12 Improvements in or relating to Resistors and their Manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR110045A FR1542510A (en) 1967-06-12 1967-06-12 Method and device for adjusting thin film resistors by thermal oxidation

Publications (1)

Publication Number Publication Date
FR1542510A true FR1542510A (en) 1968-10-18

Family

ID=8632840

Family Applications (1)

Application Number Title Priority Date Filing Date
FR110045A Expired FR1542510A (en) 1967-06-12 1967-06-12 Method and device for adjusting thin film resistors by thermal oxidation

Country Status (5)

Country Link
US (1) US3546015A (en)
DE (1) DE1765567C3 (en)
FR (1) FR1542510A (en)
GB (1) GB1176295A (en)
NL (1) NL149319B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4073971A (en) * 1973-07-31 1978-02-14 Nobuo Yasujima Process of manufacturing terminals of a heat-proof metallic thin film resistor
US4378409A (en) * 1975-09-15 1983-03-29 Trw, Inc. Electrical resistor material, resistor made therefrom and method of making the same
US4322477A (en) * 1975-09-15 1982-03-30 Trw, Inc. Electrical resistor material, resistor made therefrom and method of making the same
US4397915A (en) * 1975-09-15 1983-08-09 Trw, Inc. Electrical resistor material, resistor made therefrom and method of making the same
DE2719988C2 (en) * 1977-05-04 1983-01-05 Siemens AG, 1000 Berlin und 8000 München Amorphous metal layer containing tantalum, temperature-stable at least up to 300 degrees C, and process for its production
US5766670A (en) * 1993-11-17 1998-06-16 Ibm Via fill compositions for direct attach of devices and methods for applying same
RU2528432C1 (en) * 2013-07-09 2014-09-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Самарский государственный аэрокосмический университет имени академика С.П. Королева (национальный исследовательский университет)" (СГАУ) Device for thick-film resistor trimming
RU2568812C1 (en) * 2014-08-20 2015-11-20 Открытое акционерное общество "Научно-исследовательский институт физических измерений" Method of fabricating thin-film resistors
CN105331925B (en) * 2015-11-23 2018-02-27 江苏丰东热技术股份有限公司 A kind of high-precision dynamic vacuum control system for vacuum nitriding
RU2726849C1 (en) * 2019-12-25 2020-07-16 федеральное государственное автономное образовательное учреждение высшего образования "Самарский национальный исследовательский университет имени академика С.П. Королёва" Device for adjustment of thick-film resistors

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3108019A (en) * 1958-02-14 1963-10-22 Corning Glass Works Method of stabilizing the electrical resistance of a metal oxide film
US3159556A (en) * 1960-12-08 1964-12-01 Bell Telephone Labor Inc Stabilized tantalum film resistors
US3261082A (en) * 1962-03-27 1966-07-19 Ibm Method of tailoring thin film impedance devices
US3420706A (en) * 1964-06-23 1969-01-07 Bell Telephone Labor Inc Technique for fabrication of printed circuit resistors

Also Published As

Publication number Publication date
DE1765567A1 (en) 1972-04-13
GB1176295A (en) 1970-01-01
DE1765567C3 (en) 1974-08-22
NL6808204A (en) 1968-12-13
DE1765567B2 (en) 1974-01-31
US3546015A (en) 1970-12-08
NL149319B (en) 1976-04-15

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